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Parts Cleanliness Testing

Down to the Nanoscale Level

Parts Cleanliness Testing

When testing parts cleanliness in electronics manufacturing, precision matters. Parts such as regulators, mass flow controllers (MFCs), fittings, valves, tubing, FOUPs, and point of use (POA) filters, etc. can potentially shed particles into the process environment and gas lines. These particles can lead to component defects that affect product quality in the manufacturing process.

Engineer in cleanroom looking at semiconductor wafer

Achieve Particle Detection at 2 nm Levels

To ensure that critical components meet the highest cleanliness standards, you need solutions that detect airborne particles below 10 nm. Precise data on particulate contamination levels in the electronics production environment enables you to make informed decisions, and proactively maintain the integrity of your processes.

Nanoparticles Create Defects, Reduce Yield

Precise testing of parts cleanliness not only safeguards product performance and integrity, but also supports efficiency, compliance, innovation, and sustainability. As the industry continues to evolve, precise parts cleanliness testing is vital, supporting the advancement of critical semiconductor technology.

Don't Ignore What You Can't See

TSI is the key supplier to enable all the detection solutions you need – down to 100 nm, 10 nm, and 2 nm. We provide the instrument measurement capabilities you need to prevent even the smallest contaminants from causing significant defects while upholding the highest quality standards. Parts cleanliness has significant implications for your manufacturing processes (e.g., cleanroom compliance, final product quality) – and must be addressed.

Particle Size

Within semiconductor manufacturing, particles are of critical interest in a variety of environments and process steps. These variables, plus device design, can mean that the particle size of interest at any given point in time can vary by several orders of magnitude. Particle instrumentation design varies in its size capabilities, with some instruments designed to see down to 0.1 µm, while others can go down to 2 nm. Using an instrument to fit your particle detection needs in this respect is a foundational step towards obtaining the data you need.

False Count Rate

Data accuracy is critical to being able to make informed decisions. In the case of particle detection, this includes minimizing the incidence of ‘false positives’ – indicating that particles are present when they’re really not. This is expressed as the “false count rate” of a particle detector…and lower is better. TSI provides instruments with extremely low false count rates of <0.7 count/ft³ (of air), ensuring that the ‘false positives’ rate is minimized, and thus data accuracy is maximized.

Flow Rate

More measurements translate to better statistics, which in turn empower better decisions. Within airborne particle counting, a higher instrument flow rate enables more particle measurements in two ways: 1) by transporting a higher volume of air (and thus more particles) into the instrument to be counted, and 2) by reducing diffusion losses of particles within the instrument (i.e. preserving the particles within the airflow so that they can be counted). Through these two mechanisms, instruments with a higher flow rate provide the insight you need to make key decisions.

Frequently asked questions

Q. Why is particle shedding a concern in electronics manufacturing?

Particle shedding can contaminate sensitive electronic components, leading to defects and performance issues in electronic devices. Click here to read more about consequences of inadequate parts cleanliness testing.

Q. What are the main sources of particle shedding in electronics components?

Particles can originate from components, equipment, processes, or environmental sources. Click here to read more in blog about main sources of particle shedding.

Q. What role does parts cleanliness testing play in preventing particle shedding?

Parts cleanliness testing ensures components adhere to strict cleanliness standards, preventing contamination and maintaining product integrity. Click here to read more about main sources and possible impacts on yield.

Empowered to Ensure 0.3 µm Particle-Free Environments

A Customer Story

A Korean semiconductor leader sought TSI's help to monitor 0.3 µm particles. TSI's AeroTrak™+ Remote Particle Counter provided the solution, ensuring consistent monitoring and meeting cleanliness goals.

Read Customer Story

Down to the Nanoscale Level

Parts Cleanliness Testing

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