Wafer and Reticle Contamination Standards

Vital Tools for Defect Inspection

In the pursuit of zero defects, the ability to accurately detect and classify surface contaminants is paramount. MSP Wafer and Reticle Contamination Standards serve as the reference materials that validate the "eyes" of the fab—the inspection tools. By providing a known challenge with precise particle sizes and locations, these standards allow engineers to tune their systems for maximum sensitivity. This verification is a critical step in ensuring that inspection tools are not missing lethal defects or flagging non-existent ones.

Comprehensive Lifecycle Support

From the initial development of a new inspection platform to daily monitoring in a high-volume fab, MSP standards support every stage of the equipment lifecycle. Development standards help R&D teams push the limits of detection technology, while qualification standards ensure that new tools meet strict acceptance criteria. Once in production, calibration standards provide the daily or weekly checks needed to detect drift and maintain tool matching. This comprehensive support structure helps fabs maintain a consistent quality baseline.

Customization for Specific Needs

Every fab has unique process challenges and defect profiles. MSP offers a range of customization options to create standards that mimic specific production issues. Whether you need a specific pattern to test throughput, a mix of particle sizes to verify binning accuracy, or specific materials to match your process layers, MSP can deliver. This tailored approach ensures that your calibration strategy is directly relevant to your yield goals, providing data that is both accurate and actionable.