Featured Product
High-Flow Turbo II Vaporizer 2855PE
MSP, a division of TSI®, offers a completely new line of Vaporizers for liquid source vaporization in gas-phase processing such as Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD) used in semiconductor device fabrication.
Cleanroom Monitoring Systems
Advanced software suite for monitoring particle counts and environmental parameters with high reliability.
Condensation Particle Counters
Detect and measure airborne particles down to 2 nm with advanced condensation technology.
Handheld Particle Counters
Lightweight, portable counters ideal for spot checking and identifying contamination sources.
Liquid Flow Controllers
Reliable liquid vapor delivery controllers for enhancing CVD, ALD, and thin film deposition.
Liquid Particle Instrument
Detects nanoparticles down to 10 nm in Ultra-Pure Water (UPW) for semiconductor applications.
Particle Deposition Systems
Produces precise, traceable contamination standards for calibrating wafer inspection systems.
Particle Size Standards
For accurate calibration of wafer and photomask inspection systems.
Portable Particle Counters
Real-time, portable particle counting with built-in regulatory compliance features.
Remote Particle Counters
Compact, remote counters for continuous monitoring in large or critical cleanroom environments.
Vapor Process Gas (VPG) Filters
Filters for removing particles from gas/vapor mixtures in ALD/CVD, enhancing system performance.
Vaporizers
High-efficiency vaporizers for CVD and ALD, capable of handling thermally sensitive liquids.
Wafer and Reticle Contamination Standards
High-quality contamination standards for validating and calibrating wafer/reticle inspection systems.
With our expertise and innovative solutions, TSI and MSP position electronics manufacturers to overcome challenges and achieve success in their operations.
TSI instruments enable precise particle measurement, detecting particles as small as 2 nm, providing reliable data to address critical industry challenges and minimize process risks.
MSP's Vaporizers facilitate consistent thin film deposition, reducing defects and enabling enhanced processes.
Additionally, MSP provides contamination standards for calibration, traceable to NIST, deposited on various substrates to calibrate inspection systems. Our Particle Deposition Systems can deposit particles as small as 10 nm, enhancing semiconductor inspection tool calibration.
Together, TSI and MSP equip manufacturers with the tools and expertise to overcome obstacles and excel in their operations.