Featured Product
High-Flow Turbo II Vaporizer 2855PE
MSP, a division of TSI®, offers a completely new line of Vaporizers for liquid source vaporization in gas-phase processing such as Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD) used in semiconductor device fabrication.
Cleanroom Monitoring Systems
Certified to monitor particle counts and other relevant parameters.
Condensation Particle Counters
Enabling detection and measurement of airborne particles down to 2 nm.
Handheld Particle Counters
Lightweight, portable, ideal for cost-effective spot checking.
Liquid Flow Controllers
Reliable, high-performance liquid vapor delivery for CVD and ALD.
Liquid Particle Instrument
Down to 10 nm particle detection in ultra-pure water (UPW).
Particle Deposition Systems
Producing wafer contamination standards for inspection and quality.
Particle Size Standards
For accurate calibration of wafer and photomask inspection systems.
Portable Particle Counters
Made for real-time cleanroom particle counting: ready for measurement.
Remote Particle Counters
Ideal for monitoring of large cleanrooms or critical environments.
Vapor Process Gas (VPG) Filters
Removes nanometer and micrometer particles from the gas/vapor mixture.
Wafer and Reticle Contamination Standards
For consistent and repeatable particle size and count control.
With our expertise and innovative solutions, TSI and MSP position electronics manufacturers to overcome challenges and achieve success in their operations.
TSI instruments enable precise particle measurement, detecting particles as small as 2 nm, providing reliable data to address critical industry challenges and minimize process risks.
MSP's Vaporizers facilitate consistent thin film deposition, reducing defects and enabling enhanced processes.
Additionally, MSP provides contamination standards for calibration, traceable to NIST, deposited on various substrates to calibrate inspection systems. Our Particle Deposition Systems can deposit particles as small as 10 nm, enhancing semiconductor inspection tool calibration.
Together, TSI and MSP equip manufacturers with the tools and expertise to overcome obstacles and excel in their operations.