Featured Product
High-Flow Turbo II Vaporizer 2855PE
MSP, a division of TSI®, offers a completely new line of Vaporizers for liquid source vaporization in gas-phase processing such as Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD) used in semiconductor device fabrication.
Cleanroom Monitoring Systems
Certified to monitor particle counts and other relevant parameters.
View ProductsCondensation Particle Counters
Enabling detection and measurement of airborne particles down to 2 nm.
View ProductsHandheld Particle Counters
Lightweight, portable, ideal for cost-effective spot checking.
View ProductsLiquid Flow Controllers
Reliable, high-performance liquid vapor delivery for CVD and ALD.
View ProductsLiquid Particle Instrument
Ultra-pure water (UPW) is vital in semiconductor manufacturing for cleaning and etching, with real-time nanoparticle detection down to 10 nm ensuring high-quality production.
View ProductsParticle Deposition Systems
Producing wafer contamination standards for inspection and quality.
View ProductsParticle Size Standards
For accurate calibration of wafer and photomask inspection systems.
View ProductsPortable Particle Counters
Made for real-time cleanroom particle counting: ready for measurement.
View ProductsRemote Particle Counters
Ideal for monitoring of large cleanrooms or critical environments.
View ProductsVapor Process Gas (VPG) Filters
Removes nanometer and micrometer particles from the gas/vapor mixture.
View ProductsWafer and Reticle Contamination Standards
For consistent and repeatable particle size and count control.
View ProductsWith our expertise and innovative solutions, TSI and MSP position electronics manufacturers to overcome challenges and achieve success in their operations.
TSI instruments enable precise particle measurement, detecting particles as small as 2 nm, providing reliable data to address critical industry challenges and minimize process risks.
MSP's Vaporizers facilitate consistent thin film deposition, reducing defects and enabling enhanced processes.
Additionally, MSP provides contamination standards for calibration, traceable to NIST, deposited on various substrates to calibrate inspection systems. Our Particle Deposition Systems can deposit particles as small as 10 nm, enhancing semiconductor inspection tool calibration.
Together, TSI and MSP equip manufacturers with the tools and expertise to overcome obstacles and excel in their operations.