Particle Size Standards

To ensure accurate calibration of your surface scanning equipment or particle counters, it's essential to use reliable particle suspensions. These standards consist of solid particles with specific size ranges and concentrations suspended in ultra-pure water (UPW). The suspension is then dispersed into clean air or nitrogen and deposited onto wafers and photomasks in precise patterns and sizes.

Particle Size Standards are crucial for creating high-quality calibration benchmarks, essential for calibrating, qualifying, and monitoring the performance of wafer and photomask inspection systems.

Products

NanoSilica Size Standards

MSP’s NanoSilica™ Size Standards are concentrated suspensions of amorphous SiO2... View Product

Process Particles Suspensions

Process Particles™ Suspensions are used as particle material standards. They represent... View Product