Particle Size Standards

Foundation of Accurate Metrology

In semiconductor metrology, the accuracy of measurement data is directly tied to the quality of the reference standards used. TSI® Particle Size Standards provide the foundational accuracy needed to calibrate sophisticated inspection tools. These standards are formulated with strict controls over particle size distribution and concentration, ensuring that when they are deposited onto a substrate, they provide a known, consistent challenge to the inspection system. This consistency is key to validating tool performance over time.

Diverse Applications in Contamination Control

Beyond tool calibration, these size standards are valuable for a range of contamination control applications. They can be used to challenge cleaning processes, verify particle counter efficiency, and study particle transport within process tools. By utilizing a standardized particle source, engineers can conduct repeatable experiments and qualifications, leading to a deeper understanding of contamination dynamics within the manufacturing environment.

Supporting Global Consistency

For manufacturers with facilities worldwide, maintaining consistency across all inspection tools is a major challenge. Using TSI® Particle Size Standards helps bridge this gap by providing a common reference point. When all tools are calibrated against the same high-quality standards, data becomes comparable across different lines and fabs. This alignment supports global yield management strategies and helps ensure that product quality remains uniform, regardless of where it is produced.