Empowered to Ensure 0.3 µm Particle-Free Environments
A Korean semiconductor leader sought TSI's help to monitor 0.3 µm particles. TSI's AeroTrak™+ Remote Particle Counter provided the solution, ensuring consistent monitoring and meeting cleanliness goals.
Facility Monitoring Makes Sense
Many facilities choose to install facility monitoring systems to monitor particle counts and other environmental parameters. There are multiple benefits in use, and it makes great business sense.
High-Flow Turbo II Vaporizer 2855PE
MSP's Turbo II™ Vaporizer 2855PE is designed for high-precision microelectronic applications that require mid to high vapor flow rates. Based off of the field proven, highly reliable, and low-maintenance MSP Turbo™ Vaporizers, the new 2855PE delivers twice the vapor output in...
Low-Flow Turbo II Vaporizer 2852PE
MSP's Turbo II™ Vaporizer 2852PE is designed for high-precision microelectronic applications that require low to mid vapor flow rates. Based off of the field proven, highly reliable, and low maintenance MSP Turbo™ Vaporizers, the new 2852PE provides stable vapor concentrations...
Facility Monitoring System
OPC UA Client/Server zertifiziert zur Überwachung der Partikelanzahl und anderer Umweltparameter - wirtschaftlich sinnvoll, um Abfall zu reduzieren, den Ertrag zu steigern, die Qualität zu verbessern und den Gewinn zu erhöhen.
Liquid Flow Controllers With Valves 2950V
Designed specifically for leading edge microelectronic applications, the Turbo™ Liquid Flow Controllers 2950V pair with MSP's Turbo II™ Vaporizers to provide unmatched liquid source vapor delivery performance for semiconductor thin film deposition processes (including CVD...
AeroTrak Handheld Particle Counter 9303
Durchflussrate 2,83 L/min (0,1 CFM) / Partikelgrößen 0,3 bis 25 µm
Low-Flow Turbo II Vaporizer 2852NP
MSP's Turbo II™ Vaporizer 2852NP is designed for applications that require low to mid vapor flow rates. Based off of the field proven, highly reliable, and low-maintenance MSP Turbo™ Vaporizers, the new 2852NP provides stable vapor concentrations while maintaining a very small...
AeroTrak Remote Particle Counter 7110
Durchflussrate 28,3 L/min (1,0 CFM) / Partikelgrößen 0,100 bis 10,0 µm
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