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Liquid Flow Controllers

The MSP Turbo™ Liquid Flow Controllers (LFC) enhance semiconductor thin film deposition processes like CVD, PECVD, ALD, and MOCVD.

Engineered to work seamlessly with MSP Turbo II™ Vaporizers, the ensure reliable and high-performance liquid vapor delivery. Key benefits include accelerated processes with reduced liquid waste, enhanced process stability for consistent results, shortened R&D timelines, and straightforward integration into existing control systems.

Produkte

Liquid Flow Controllers Without Valves 2950

Built upon field proven technology, the MSP Turbo™ Liquid Flow Controllers 2950 were...

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Liquid Flow Controllers With Valves 2950V

Designed specifically for leading edge microelectronic applications, the Turbo™ Liquid Flow...

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