Vapor Process Gas (VPG) Filters

MSP’s Vapor Process Gas (VPG) Filters are crucial components in vaporizing systems, effectively removing nanometer and micron-sized particles from gas/vapor mixtures used in ALD and CVD applications.

Positioned downstream of vaporizers under vacuum flow conditions, these filters minimize the risk of condensation and gas phase conversion, ensuring only purified vapors enter the deposition process. They offer enhanced particle capture efficiency, thermal resistance, and when heat-wrapped, act as secondary heat exchangers to vaporize liquid contaminants, thereby optimizing system performance and reliability.

Products

VPG-A3 Inline Filter

High efficiency filtration down to 2nm and up to 100 SLPM. The VPG-A3 Vapor Process Gas filter... View Product

VPG-A6 Inline Filter

Ultra-high efficiency filtration down to 2 nm and below. The industry leading VPG-A6 Vapor... View Product