Deposition Services

MSP, a Division of TSI®, provides deposition services to create wafer and reticle contamination standards that support every stage of the semiconductor inspection system lifecycle. Each standard is produced with controlled particle size, composition, and count to deliver repeatable, traceable deposits. Services include Dev-Dep™ for development, Qual-Dep™ for tool qualification, Cal-Dep™ for traceable calibration, and Particle Removal Efficiency (PRE) testing to help users assess and refine cleaning processes.

Products

PRE Challenge Wafers and Photomasks

Reliable, cost-effective wafers for PRE testing, validating cleaning processes, and supporting high-yield semiconductor production.

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Cal-Dep Calibration Contamination Standards

Precise particle deposition for SPC, ensuring consistent tool performance in semiconductor manufacturing.

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Qual-Dep Qualification Contamination Standards

Standards for certifying defect inspection tools, reducing procurement risk, and ensuring global tool consistency.

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Dev-Dep Development Contamination Standards

Customizable wafers for R&D, optimizing inspection tool sensitivity, and accelerating new semiconductor tech development.

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Tailored Solutions for Inspection Challenges

Off-the-shelf standards do not always fit the specific needs of advanced semiconductor manufacturing. MSP Deposition Services offer a pathway to custom solutions, allowing you to design contamination standards that address your unique inspection challenges. Whether you are developing next-generation metrology tools or refining a specific process recipe, our team works with you to define the particle types, sizes, and patterns that will provide the most value. This collaboration ensures that the standards you receive are perfectly aligned with your technical objectives.

Precision and Traceability

At the heart of MSP's deposition services is a commitment to metrology-grade precision. We utilize advanced particle generation and deposition technology to place particles with high positional accuracy and size control. All calibration standards are traceable to SI units, providing the chain of custody required for rigorous quality systems. This attention to detail helps ensure that your reference materials are robust, repeatable, and accepted by industry auditors.

Supporting Process Optimization

Beyond tool calibration, our deposition services are a powerful resource for process engineering. Through Particle Removal Efficiency (PRE) testing, we deposit controlled challenges on wafers that allow you to test the effectiveness of cleaning chemistries and equipment. This empirical data is invaluable for optimizing cleaning processes, reducing chemical usage, and improving overall yield. By leveraging MSP's expertise, you can make data-driven decisions that enhance the efficiency and performance of your manufacturing line.


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