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Semiconductor Manufacturing

Lower Your Risk and Don't Fail an Audit
Contamination Control for Monitoring
Ultra-Clean Semiconductor Environments

Semiconductor shortages and the race to smaller process nodes. The integrated circuit (IC) shortages demand more output from manufacturing processes, while the industry leaders compete for smaller process nodes. These challenges require airborne particle contamination monitoring to ensure the product is not at risk, the output (yield) increases, and the process does not fail cleanroom audits. TSI meets the semiconductor’s shortages and smaller process nodes with our high-sensitivity airborne particle counters that provide complete monitoring solutions from nanoparticles to sub-micron and beyond. TSI 10 nm cleanroom condensation particle counter (CPC) and 0.1 μm airborne particle counters (handheld particle counters and remote particle counters) are the best combination to meet the critical needs of the semiconductor industry.

TSI meets the semiconductor’s shortages and quickly developing process changes with our high-sensitivity airborne particle counters that provide complete monitoring solutions from nanoparticles to sub-micron and beyond. TSI 10 nm cleanroom condensation particle counter (CPC) and 0.1 μm airborne particle counters (handheld particle counters and remote particle counters) are the best combination to meet the critical needs of the semiconductor industry.

TSI provides high-sensitivity particle counting for almost 60 years —longer than any other particle counter company. TSI instruments are used worldwide in national standards laboratories that require superior accuracy, repeatability, and reliability. Don’t compromise your manufacturing process—trust TSI to detect it all.

Reliable, high-sensitivity particle counting instruments that work

  • 10 nm particle measurement like no other. 0.1 μm particle counting instruments will not detect nanoparticle contamination—you need a CPC (condensation particle counter). Using TSI's decades of experience in CPC technology, the water-based TSI AeroTrak 9001 Cleanroom Condensation Particle Counter (CPC) is specifically designed for ultra-clean semiconductor manufacturing providing incredibly low false-counts, real-time nanoparticle detection, and 0.1 cfm flow rates for detecting particles in the air or inert pressurized gases. See video demo here
     
  • 0.1 µm particle measurement you can trust. The 1 CFM TSI AeroTrak® 7110 Remote Particle Counter and TSI AeroTrak 9110 Portable Particle Counter are trusted for their accuracy and reliability. In fact, both models include the industry’s best 4-year laser warranty.

TSI: We Detect All Size Particles

  • 0.2 µm, 0.3 µm and 0.5 µm particle measurements you can trust. The TSI AeroTrak+ Remote Particle Counters and AeroTrak+ Remote Particle Counters with Pump include the industry’s best 5-year laser warranty. Simple installation, and the AeroTrak+ Remote Particle Counters with Pump do not require external vacuum sources. Power-over-ethernet or wireless connectivity further reduces cabling and installation overhead.

Cleanroom Particle Monitoring Has Never Been So Easy

  • Continuous monitoring of semiconductor tools and mini-environments. TSI FMS Software (with OPC UA Client/Server functionality) seamlessly integrates a range of instruments, including TSI AeroTrak Portable Particle Counters, TSI AeroTrak+ Remote Particle Counters, and environmental sensors. Combined with the best-in-class features of TSI FMS Software, including OPC UA Client/Server, distributed databases, and hot standby, TSI provides the unparalleled flexibility and reliability for different information technology systems and software applications. These systems make it easy to communicate, exchange data, and use the information to continuously monitor semiconductor manufacturing cleanrooms for particle events.

  • Periodic particle monitoring in a semiconductor space. All TSI AeroTrak Portable Particle Counters operate as standalone instruments or as part of a facility monitoring system. The instruments can perform mobile periodic airborne particle monitoring and quickly identify risks in a semiconductor environment.

  • Semiconductor cleanroom classification. All TSI AeroTrak Portable Particle Counters are designed to simplify and speed up the cleanroom classification process. With ISO 14644-1 reporting built-in, TSI particle counting instruments provide an automated interface to easily complete the classification process.

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