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Semiconductor Manufacturing

Contamination Control for Ultra-Clean Environments

Semiconductor node scales continue to decrease to single-digit nanometer dimensions. Monitoring sub-micrometer airborne particle contamination is vital to ensure high product yield. TSI’s high-sensitivity airborne particle counters offer the highest quality sub-micron and nanoparticle measurements on the market. TSI 0.1 μm airborne particle counters and 10 nm cleanroom condensation particle counter (CPC) are designed to meet the critical needs of the semiconductor industry.

TSI is a recognized leader in high-sensitivity particle counting. TSI instruments are used in national standards laboratories worldwide. Don’t compromise your manufacturing environment with sub-micron airborne contamination—trust TSI to detect it all. 

Reliable, high-sensitivity particle counting instruments that work

TSI: We Detect All Size Particles

  • 0.2 µm, 0.3 µm and 0.5 µm measurements you can have confidence in. The AeroTrak+ Remote Particle Counters and AeroTrak+ Remote Particle Counters with Pump are backed by an unmatched standard 5 year laser warranty. Simple installation, no remote vacuum pumps needed when using AeroTrak+ Remote Particle Counters with Pump. Power over Ethernet and a wireless connectivity reduce cabling and installation overhead.

Cleanroom particle monitoring has never been so easy

  • Continuous Monitoring of Semiconductor Tools and Mini-Environments. TSI FMS Software (with OPC UA Client/Server functionality) seamlessly integrates a range of instruments, including TSI AeroTrak Portable Particle Counters, TSI AeroTrak+ Remote Particle Counters, and environmental sensors. Combined with the best-in-class features of TSI FMS Software, including OPC UA Client/Server, distributed databases, and hot standby, TSI provides the unparalleled flexibility and reliability for different information technology systems and software applications. This systems makes it easy to communicate, exchange data, and use the information that has been exchanged to continuously monitor semiconductor manufacturing cleanrooms.

  • Perodic Particle Monitoring in a Semiconductor Space. All TSI AeroTrak Portable Particle Counters operate as standalone instruments or as part of a facility monitoring system. It's easy to perform simple periodic airborne particle monitoring in a semiconductor environment for real-time detection of contaminants.

  • Semiconductor Cleanroom Classification. All TSI AeroTrak Portable Particle Counters are designed to simplify and speed up the cleanroom classification process. With ISO 14644-1 reporting built-in, TSI particle counting instruments are simple to setup and easy to use.

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