Vaporizers

Vaporizers are the backbone of gas phase processes, serving as the catalyst for converting liquids into essential gases. This transformative process is indispensable in a myriad of applications, ranging from precision thin film deposition to critical procedures like metal etching and doped epitaxial growth. Vaporizers find their versatile utility in various domains, including:

• CVD (Chemical Vapor Deposition)
• PECVD (Plasma-Enhanced Chemical Vapor Deposition)
• MOCVD (Metal-Organic Chemical Vapor Deposition)
• ALD (Atomic Layer Deposition)

The Turbo II™ Vaporizer Difference
Twice the Output, Half the Size

MSP’s new Turbo II™ Vaporizers use a droplet vaporization, direct liquid injection (DLI) technique designed to meet modern demanding vaporization needs. This patented technology offers a broad range of advantages over older, more conventional techniques.

Inspired by breakthroughs in the science of droplet atomization and evaporation, these innovative vaporizers are half the physical footprint of earlier versions, while delivering a staggering 200 % increase in vapor output.

In thin film applications, the stable and uniform vapor leads to a higher quality thin film and higher wafer yields. The precision and control of the vaporizer makes it possible to vaporize difficult precursors, which were not usable before, opening up new areas for process development. The unique design provides highly reliable, stable operation resulting in less downtime and more money saved for users (low cost of ownership).

Features and Benefits

• Extremely stable concentration output
• Low temperature vaporization for minimized thermal decomposition risk
• Longer mean time between repair (MTBR)
• Ability to vaporize even the most challenging precursors
• Direct liquid injection for on-demand vaporization
• Enhanced potential for higher vapor concentration
• Robust clog-resistant design

Applications Across Diverse Industries

• Semiconductor Microelectronics
• LEDs Optoelectronics
• Protective Coatings
• Nanoparticle Synthesis
• Energy Production/Storage
• Powder/Fiber Processing
• Solar Photovoltaic
• Medical Device
• Bio Assays