Liquid Flow Controllers

The MSP Turbo™ Liquid Flow Controller (LFC) 2950 is purpose-built to pair with MSP Turbo II™ Vaporizers, delivering fast, accurate, and stable liquid flow for semiconductor thin film processes, including CVD, PECVD, ALD, and MOCVD. With ±1% set-point accuracy in just 300 ms, it helps boost throughput and minimizes waste, for tighter process control and higher yields in demanding 300 mm microelectronics applications.

Flexible, Reliable, and Easy to Use

The 2950 LFC allows quick liquid changes without factory recalibration, offers wide flow ranges (200 mg to 40 g/min), and supports EtherCAT®, RS485, and analog communication. Its proven control loop design - refined through over a decade of field use - helps maintain precision even in changing environments, reducing downtime and improving process stability.