Vaporizers

MSP, a Division of TSI MSP’s Turbo II™ Vaporizers set a new standard in liquid-to-vapor conversion for Atomic Layer Deposition (ALD), Chemical Vapor Deposition (CVD), Metal-Organic Chemical Vapor Deposition (MOCVD), and Plasma-Enhanced Chemical Vapor Deposition (PECVD) processes. Using advanced droplet vaporization and direct liquid injection (DLI), they deliver up to 200% more vapor output in half the footprint of previous designs - helping ensure stable, uniform vapor for higher quality thin films, improved wafer yields, and the ability to process even challenging precursors.

Precision Vapor Delivery for Demanding Applications

With a robust, clog-resistant design and low-temperature vaporization to minimize thermal decomposition, Turbo II™ Vaporizers offer exceptional stability, extended uptime, and lower operating costs. Ideal for semiconductor manufacturing, microelectronics, LEDs, protective coatings, nanoparticle synthesis, and more, they provide the precision, control, and flexibility to advance next-generation process development.

Unlocking the Power of Filters in CVD Defect Reduction

Delve deeper into the art of reducing CVD defects by exploring our insightful white paper on the critical role of post-vaporization filtration.

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Turbo Vaporizer 2821

										The 2821 MSP Turbo™ Vaporizer is our highest liquid flow rate unit. This model features 2400W of heater power and can be used to deliver flow rates up to 6000g/hr (TEOS or equivalent).

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High-Flow Turbo II Vaporizer 2855PE

										MSP's Turbo II™ Vaporizer 2855PE is designed for high-precision microelectronic applications that require mid to high vapor flow rates. Based off of the field proven, highly reliable, and low-maintenance MSP Turbo™ Vaporizers, the new 2855PE delivers twice the vapor output in a footprint that is half the size.

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High-Flow Turbo II Vaporizer 2855NP

										MSP's Turbo II™ Vaporizer 2855NP is designed for applications that require mid to high vapor flow rates. Based off of the field proven, highly reliable, and low-maintenance MSP Turbo™ Vaporizers, the new 2855NP delivers twice the vapor output in a footprint that is half the size. The 2855NP has a liquid shut-off valve, and can be used with any liquid flow controller that has an integrated flow control valve.

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Low-Flow Turbo II Vaporizer 2852PE

										MSP's Turbo II™ Vaporizer 2852PE is designed for high-precision microelectronic applications that require low to mid vapor flow rates. Based off of the field proven, highly reliable, and low maintenance MSP Turbo™ Vaporizers, the new 2852PE provides stable vapor concentrations while maintaining a very small footprint. The 2852PE also features an on-board flow control valve for extremely fast flow-rate response.

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Low-Flow Turbo II Vaporizer 2852NP

										MSP's Turbo II™ Vaporizer 2852NP is designed for applications that require low to mid vapor flow rates. Based off of the field proven, highly reliable, and low-maintenance MSP Turbo™ Vaporizers, the new 2852NP provides stable vapor concentrations while maintaining a very small footprint. The 2852NP also has a liquid shut-off valve, and can be used with any liquid flow controller that has an integrated flow control valve.

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