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Vaporizers

Better Vaporization – More Process Options

Vaporizers

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Vaporizers are used in gas phase processes to transition a liquid into a gas for thin film deposition or other processes that require a vapor (metal etch, doped epitaxial growth, etc). Vaporizers are widely used in:

  • CVD (Chemical Vapor Deposition)
  • PECVD (Plasma-Enhanced Chemical Vapor Deposition)
  • MOCVD (Metal-Organic Chemical Vapor Deposition)
  • ALD (Atomic Layer Deposition)

Wider Process Window. Improved Film Quality. Less Maintenance.

MSP’s Turbo-Vaporizers™ use a droplet vaporization, direct liquid injection technique. Our vaporizers use advanced technology in aerosol science and thermo-dynamics to create a more refined solution to vaporizing liquids.

In thin film applications, our Turbo-Vaporizers’ stable and uniform vapor leads to a higher quality thin film and higher wafer yields with less down time. MSP’s Vaporizers provide faster response time, high precision flow control, and are able to operate at high temperatures.

Features and Benefits:

  • Extremely stable concentration output
  • Low temperature vaporization/reduced risk of thermal decomposition
  • Longer Mean Time Between Repair (MTBR)
  • Ability to vaporize difficult precursors
  • Direct liquid injection - vapor on demand
  • Higher vapor concentration potential
  • Clog-resistant design

Applications include:

  • Semiconductor Microelectronics
  • LEDs Optoelectronics
  • Protective Coatings
  • Nanoparticle Synthesis
  • Energy Production/Storage
  • Powder/Fiber Processing
  • Solar Photovoltaic
  • Medical Device
  • Bio Assays

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Turbo Vaporizer 2821

The 2821 MSP Turbo™ Vaporizer is our highest liquid flow rate unit. This model features 2400W of heater power and can be used to deliver flow rates up to 6000g/hr (TEOS or equivalent).

High-Flow Turbo II Vaporizer 2855PE

MSP's Turbo II™ Vaporizer 2855PE is designed for high-precision microelectronic applications that require mid to high vapor flow rates. Based off of the field proven, highly reliable, and low-maintenance MSP Turbo™ Vaporizers, the new 2855PE delivers twice the vapor output in a footprint that is half the size.

High-Flow Turbo II Vaporizer 2855NP

MSP's Turbo II™ Vaporizer 2855NP is designed for applications that require mid to high vapor flow rates. Based off of the field proven, highly reliable, and low-maintenance MSP Turbo™ Vaporizers, the new 2855NP delivers twice the vapor output in a footprint that is half the size. The 2855NP has a liquid shut-off valve, and can be used with any liquid flow controller that has an integrated flow control valve.

Low-Flow Turbo II Vaporizer 2852PE

MSP's Turbo II™ Vaporizer 2852PE is designed for high-precision microelectronic applications that require low to mid vapor flow rates. Based off of the field proven, highly reliable, and low maintenance MSP Turbo™ Vaporizers, the new 2852PE provides stable vapor concentrations while maintaining a very small footprint. The 2852PE also features an on-board flow control valve for extremely fast flow-rate response.

Low-Flow Turbo II Vaporizer 2852NP

MSP's Turbo II™ Vaporizer 2852NP is designed for applications that require low to mid vapor flow rates. Based off of the field proven, highly reliable, and low-maintenance MSP Turbo™ Vaporizers, the new 2852NP provides stable vapor concentrations while maintaining a very small footprint. The 2852NP also has a liquid shut-off valve, and can be used with any liquid flow controller that has an integrated flow control valve.