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Liquid Flow Controllers
*Merci de noter que cette page est disponible en anglais uniquement.*
Liquid Flow Controllers modulate how much liquid enters a vaporizer, and in turn regulate the concentration of the vapor.
Our PE vaporizers use a precision Piezo-valve to control the rate of liquid flow to the vaporizer, significantly reducing dead volume and improving response time.
Fast Response Time. Self-Learning. Zoned Pid Values. Flexible Solutions.
MSP’s versatile Liquid Flow Controller can be used to control the on-board Piezo valve in PE vaporizers. It can maintain a steady liquid flow, or generate repeatable short duration vapor pulses for ALD (atomic layer deposition) applications.
Key Features and Benefits:
- Supports Zoned PID settings
- Has a self-learning function to optimize control
- Response time of < 200 ms
- 3 models that cover a liquid flow rate range from 0.08g/min (H2O) to 32 g/min (TEOS)
Liquid Flow Controllers Without Valves 2950
Built upon field proven technology, the MSP Turbo™ Liquid Flow Controllers 2950 were engineered to pair with MSP Turbo II™ Vaporizers to provide a reliable, high-performance liquid vapor delivery solution for semiconductor thin film deposition processes (including CVD, PECVD, ALD, and MOCVD).
Liquid Flow Controllers With Valves 2950V
Designed specifically for leading edge microelectronic applications, the Turbo™ Liquid Flow Controllers 2950V pair with MSP's Turbo II™ Vaporizers to provide unmatched liquid source vapor delivery performance for semiconductor thin film deposition processes (including CVD, PECVD, ALD, and MOCVD).