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Liquid Flow Controllers
Our PE MSP Turbo™ Vaporizers use a precision Piezo-valve to control the rate of liquid flow to the vaporizer, significantly reducing dead volume and improving response time.
Use our interactive product selector to find the right vapor delivery solution for your CVD thin film application.
MSP’s versatile Liquid Flow Controller can be used to control the on-board Piezo valve in PE vaporizers. It can maintain a steady liquid flow, or generate repeatable short duration vapor pulses for ALD (atomic layer deposition) applications.
Key Features and Benefits:
Learn more by downloading our white paper on reducing CVD defects with post-vaporization filtration