Dimensions (HxWxD) |
249 mm x 79 mm x 142 mm (9.8 inch x 3.1 inch x 5.6 inch) |
|
Weight | 5.1 kg (11.2 lb) | |
Fittings (on the unit) | Carrier Gas Inlet | 1/4 in. VCR female split nut |
Liquid Inlet | 1/8 in. VCR female | |
Vapor Outlet | 1/2 in. VCR female | |
Compressed Air | 4 mm instant tube fitting | |
Wetted Parts | SS 316, PEEK, PTFE, Elgiloy®, FFKM | |
Leak Integrity | ≤ 1x 10-8 Pa·m3/s Helium | |
Heater Power Requirements1 | 208 VAC, 60 Hz, 900 W | |
Carrier Gas | Inert gas recommended | |
Max Carrier Gas Flow1 | 10 standard liters/min N2 @ 50 psig | |
Max Liquid Flow2 |
40 g/min (TEOS or equivalent) |
|
System Pressure Limit | 150 psig | |
Compressed Air | 90 to 110 psig | |
Temperature Range3 | 40°C to 200°C | |
Temperature Sensor | 2 type Ƙ thermocouples |
Specifications subject to change without notice.
1 Max Carrier Flow, Heater Power (W) and Line Voltage are factory adjustable, visit www.tsi.com/contact to request more information
2 Max. liquid flow is process dependent. The spec assumes a vaporizer temperature of 200°C, max. carrier gas flow and pressure <50 Torr immediately downstream of the vaporizer.
3 Appropriate venting is required.