TSI’s Particle Sizer with Atomization Solution combines controlled aerosolization with advanced particle sizing to provide precise, size-resolved insight into particle size distributions in liquids and gases. From sub-30 nm CMP slurry characterization beyond the typical limits of dynamic light scattering (DLS) to gas and liquid filter testing aligned with ISO 12500-3, SEMI F38, and SEMI C79, the solution supports both R&D and production workflows with data to better understand processes, evaluate performance, and drive process optimization.
Products
General Scanning Mobility Particle Sizer SMPS 3938
Choose your configuration of the global standard in aerosol size measurement. For more than 30...