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Better Vaporization – More Process Options

Vaporizers are used in gas phase processes to transition a liquid into a gas for thin film deposition or other processes that require a vapor (metal etch, doped epitaxial growth, etc). Vaporizers are widely used in:

  • CVD (Chemical Vapor Deposition)
  • PECVD (Plasma-Enhanced Chemical Vapor Deposition)
  • MOCVD (Metal-Organic Chemical Vapor Deposition)
  • ALD (Atomic Layer Deposition)

Wider Process Window. Improved Film Quality. Less Maintenance.

MSP’s Turbo-Vaporizers™ use a droplet vaporization, direct liquid injection technique. Our vaporizers (also known as liquid source bubblers or CVD bubblers) use advanced technology in aerosol science and thermo-dynamics to create a more refined solution to vaporizing liquids.

In thin film applications, our Turbo-Vaporizers’ stable and uniform vapor leads to a higher quality thin film and higher wafer yields with less down time. MSP’s Vaporizers provide faster response time, high precision flow control, are able to operate at high temperatures, and are built with a clog-resistant design.


Features and Benefits:

  • Extremely stable concentration output
  • Low temperature vaporization/reduced risk of thermal decomposition
  • Longer Mean Time Between Repair (MTBR)
  • Ability to vaporize difficult precursors
  • Direct liquid injection - vapor on demand
  • Higher vapor concentration potential
  • Clog-resistant design

Applications include:

  • Semiconductor Microelectronics
  • LEDs Optoelectronics
  • Protective Coatings
  • Nanoparticle Synthesis
  • Energy Production/Storage
  • Powder/Fiber Processing
  • Solar Photovoltaic
  • Medical Device
  • Bio Assays

Filters are an important part of reducing CVD defects

Learn more by downloading our white paper on reducing CVD defects with post-vaporization filtration


Turbo-Vaporizer 2860PE

The 2860PE was designed as a drop-in replacement for poorly performing DLI valves. This model has...

Turbo-Vaporizer 2841PE

The 2841PE Turbo-Vaporizer™ was designed for high flow water vapor. This model has the...

Turbo-Vaporizer 2840PE

The 2840PE Turbo-Vaporizer™ is one of our smallest vaporizers and has the state-of-the art...

Turbo-Vaporizer 2821

The 2821 Turbo-Vaporizer™ is our highest liquid flow rate unit. This model features 3600W...

Turbo-Vaporizer 2820D

The 2820D Turbo-Vaporizer™ has dual liquid inlets, making it a good choice for research...

Turbo-Vaporizer 2820

The 2820 Turbo-Vaporizer™ is a classic system. This model is a great choice for easy to...

Turbo-Vaporizer 2801PE

The 2801PE Turbo-Vaporizer™ was designed for high flow, expansive vapors, making it a good...

Turbo-Vaporizer 2800PE

The 2800PE Turbo-Vaporizer™ is a great all around vaporizer and works well for most...

Turbo-Vaporizer 2800

The 2800 Turbo-Vaporizer™ can be operated at temperatures up to 300ºC, making it a...

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