Ensuring High-Quality Wafer Production: The Importance of Particle Removal Efficiency Testing
High yields and minimal defects in semiconductor wafer production depend on effective cleaning systems. Proper validation ensures contaminants are removed, preserving wafer integrity throughout production.
Difficult-to-Vaporize and Thermally-Sensitive Liquids
Discover how a global semiconductor tool manufacturer overcame challenges in vaporizing TEMAZr and CpZr precursors crucial for ZrO₂ deposition.
Condensation Particle Counters
TSI’s cleanroom facility environmental monitoring products with built-in redundancy provide the confidence you need.
Vaporizers
Vaporizers are used in gas phase processes to transition a liquid into a gas for thin film deposition or other processes that require a vapor.
Particle Deposition Systems
Deposited particle size and count are controlled with precision, accuracy, and repeatability.
Ensuring Parts Cleanliness to Enhance Semiconductor Manufacturing Quality
Discover how a leading Japanese semiconductor supplier achieved unprecedented cleanliness in their manufacturing processes with TSI's revolutionary Water-based Condensation Particle Counter 3789 (WCPC).
Best Practices to Ensure Cleanliness of High-purity Gases
Maintaining high purity gases is vital to avoid defects and ensure semiconductor quality. Best practices include real-time monitoring of particles as small as 2 nm and strict regulatory compliance.
AeroTrak Portable Particle Counter 9110
Flow Rate 1 CFM (28.3 L/min) ±5% accuracy / Particle Size Range 0.100 to 10.0 µm
AeroTrak Handheld Particle Counter 9306
Flow Rate 0.1 CFM (2.83 L/min) ±5% accuracy / Particle Size Range 0.3 to 25 µm
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