Vapor Process Gas (VPG) Filters
MSP’s Vapor Process Gas (VPG) Filters are purpose-built to operate downstream of vaporizers, removing nanometer- and micron-sized particles from gas/vapor mixtures in ultra-low pressure environments. Designed for CVD and ALD applications, they help ensure clean precursor delivery by preventing contamination and reducing the risk of unwanted gas-phase reactions.
Performance Without Compromise
With chemical and thermal resistance, an extremely low pressure drop, and filtration efficiency up to twelve 9s at 2 nm (99.9999999999% @ 1 standard L/min), VPG Filters deliver long service life and exceptional reliability. Their robust stainless steel core and nano-filtration media also function as a secondary heat exchanger, helping maintain stable vapor conditions for consistent, high-quality thin film production.
Unlocking the Power of Filters in CVD Defect ReductionDelve deeper into the art of reducing CVD defects by exploring our insightful white paper on the critical role of post-vaporization filtration. |