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Vapor Process Gas (VPG) Filters

High-Efficiency Filtration for CVD & ALD

Vapor Process Gas (VPG) Filters

MSP, a Division of TSIMSP’s Vapor Process Gas (VPG) Filters are purpose-built to operate downstream of vaporizers, removing nanometer- and micron-sized particles from gas/vapor mixtures in ultra-low pressure environments. Designed for CVD and ALD applications, they help ensure clean precursor delivery by preventing contamination and reducing the risk of unwanted gas-phase reactions.

Performance Without Compromise

With chemical and thermal resistance, an extremely low pressure drop, and filtration efficiency up to twelve 9s at 2 nm (99.9999999999% @ 1 standard L/min), VPG Filters deliver long service life and exceptional reliability. Their robust stainless steel core and nano-filtration media also function as a secondary heat exchanger, helping maintain stable vapor conditions for consistent, high-quality thin film production.
 

Unlocking the Power of Filters in CVD Defect Reduction

Delve deeper into the art of reducing CVD defects by exploring our insightful white paper on the critical role of post-vaporization filtration.

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VPG-A3 Inline Filter

High efficiency filtration down to 2nm and up to 100 SLPM. The VPG-A3 Vapor Process Gas filter is an ultra-low pressure drop, highly-efficient in-line filter designed for vapor and process gas filtration. This patent-protected 316L SS filter, is chemically and thermally-resistant and can be used up to 100 SLPM. The extremely low pressure drop of this filter makes it easier to work in ultra-low pressure environments and reduces the risk of gas phase reactions occurring in the filter.

VPG-A6 Inline Filter

Ultra-high efficiency filtration down to 2 nm and below. The industry leading VPG-A6 Vapor Process Gas filter is an ultralow pressure drop, ultra-high efficiency in-line filter designed for vapor and process gas filtration. This patent-protected 316L SS filter is chemically- and thermally-resistant and provides up to 99.9999999999% (twelve 9s) of efficiency at 2.5 nm - an estimated particle penetration of less than one part per trillion (ppt). The extremely low pressure drop of this filter makes it easier to work in ultra-low pressure environments and reduces the risk of gas phase reactions occurring in the filter.