SPx Calibration Wafer Standards

Ensure peak performance of your Surfscan® SP1 and SP2 tools with MSP’s SPx Calibration Wafer Standards - a precise and cost-effective, readily available solution for wafer surface defect inspection calibration and validation.
 

Why SPx Calibration Standards Matter in Semiconductor Manufacturing

With thousands of Surfscan® SP1 and SP2(+) wafer surface inspection systems in operation globally, these industry workhorses require precise and consistent calibration. Traditionally, fabs have relied on a single-source provider, facing long lead times and high costs. Additionally, maintaining clean and functional calibration wafers is critical, as they are used daily, weekly, monthly, and annually for:

✔ Calibration verification
✔ Tool matching
✔ Post-PM qualification
✔ Ongoing process validation

MSP understands the challenges of maintaining accurate calibration curves. Our SPx Calibration Standards for wafer surface defect inspection provide narrower particle distributions and more accurate peak sizing with a NIST-traceable process, ensuring unmatched quality and repeatability.
 

Upgrade Your Calibration Process - Contact Us Today!

Get precise and cost-effective SPx Calibration Wafer Standards from MSP, a Division of TSI.
Contact us today to optimize your calibration and metrology workflows!

Surfscan is a registered trademark of KLA Corporation.