Cost-Effective SPx Calibration Standards for Surfscan® SP1/SP2 Tools

MSP’s SPx Calibration Wafer Standards provide a precise, cost-effective solution for wafer surface defect inspection calibration. Designed for Surfscan® SP1/SP2 tools, our standards ensure consistent calibration, accuracy, and NIST-traceability for reliable inspection results.
 

Why SPx Calibration Standards Matter in Semiconductor Manufacturing

With thousands of Surfscan® SP1 and SP2(+) wafer surface inspection systems in operation globally, these industry workhorses require precise and consistent calibration. Traditionally, fabs have relied on a single-source provider, facing long lead times and high costs. Additionally, maintaining clean and functional calibration wafers is critical, as they are used daily, weekly, monthly, and annually for:

✔ Calibration verification
✔ Tool matching
✔ Post-PM qualification
✔ Ongoing process validation
 

Key Benefits of SPx Calibration Standards

Precise Calibration – Ensure consistent, repeatable calibration for wafer defect inspection.

Cost-Effective – Lower costs with affordable SPx Calibration Standards.

NIST-Traceable – Maintain high-quality standards with NIST-traceable calibration.

Optimized for Surfscan® SP1/SP2 – Designed for Surfscan® tools, ensuring accuracy and efficiency in wafer inspections.
 

Upgrade Your Calibration Process - Contact Us Today!

Get precise and cost-effective SPx Calibration Wafer Standards from MSP, a Division of TSI.
Contact us today to optimize your calibration and metrology workflows!

Surfscan is a registered trademark of KLA Corporation.