Cost-Effective SPx Calibration Standards for Surfscan® SP1/SP2 Tools

MSP’s SPx Calibration Wafer Standards provide a precise, cost-effective solution for wafer surface inspection and semicodnuctor defect inspection. Designed for Surfscan® SP1/SP2 tools, our standards ensure consistent calibration accuracy and NIST-traceability for reliable inspection and defect inspection results.
 

Why SPx Calibration Standards Matter in Semiconductor Manufacturing

With thousands of Surfscan® SP1 and SP2(+) wafer surface inspection systems in operation globally, consistent and precise calibration is essential to support high-performance semiconductor defect inspection. Traditionally, fabs have relied on a single-source provider, often facing long lead times and high costs. often facing high costs and lengthy lead times. MSP’s SPx Calibration Standards offer a more efficient and affordable alternative.

Clean and reliable calibration wafers are critical, as they are used regularly for:

✔ Calibration verification
✔ Tool matching
✔ Post-PM qualification
✔ Ongoing process validation
 

Key Benefits of SPx Calibration Standards

Precise Calibration – Ensure consistent, repeatable calibration for advanced wafer surface inspection tools.

Cost-Effective – Reduce overhead with affordable SPx Calibration Standards.

NIST-Traceable – Maintain high-quality standards with NIST-traceable calibration.

Optimized for Surfscan® SP1/SP2 – Designed for Surfscan® tools, ensuring accuracy and efficiency in semiconductor defect inspection.
 

Upgrade Your Calibration Process - Contact Us Today!

Get precise and affordable SPx Calibration Wafer Standards from MSP, a Division of TSI.
Contact us today to optimize your calibration and metrology workflows and enhance your wafer surface inspection capabilities!

Surfscan is a registered trademark of KLA Corporation.