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Explores how Direct Liquid Injection (DLI) systems and Fourier Transform Infrared (FTIR) spectroscopy are used to optimize the delivery of high-k dielectric precursors.

Flow Rate 0.1 CFM (2.83 L/min) ±5% accuracy / Particle Size Range 0.3 to 25 µm

MSP's Qual-Dep™ Reticle Qualification Contamination Standards are specifically designed to meet your exact tool qualification needs, providing reliable solutions for validating and aligning reticle inspection systems to ensure optimal performance and minimize risks in...

Flow Rate 1 CFM (28.3 L/min) ±5% accuracy / Particle Size Range 0.100 to 10.0 µm

Poor testing can lead to low product quality and revenue loss. Using TSI particle counters enables real-time contamination detection, supporting process optimization and higher manufacturing efficiency.

Water-Based Condensation Particle Counters (WCPCs) deliver accurate concentrations of particles in gases while making use of safe, eco-friendly and easily available distilled water. When combined with a particle sizer, nanoparticle size distributions and concentration can be...

Flow Rate 1 CFM (28.3 L/min) / Particle Size Range 0.3 to 25 μm / Integrated Pump

Flow Rate 1 CFM (28.3 L/min) / Particle Size Range 0.5 to 25 μm / Integrated Pump / VHP Option

MSP’s PRE testing solutions bring academic-level precision to fab-floor challenges, enabling engineers to validate cleaning performance with confidence.

Compliance with ISO 14644 standards is essential to control airborne particulate contamination levels.