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Maintaining high purity gases is vital to avoid defects and ensure semiconductor quality. Best practices include real-time monitoring of particles as small as 2 nm and strict regulatory compliance.

Explores how Direct Liquid Injection (DLI) systems and Fourier Transform Infrared (FTIR) spectroscopy are used to optimize the delivery of high-k dielectric precursors.

Flow Rate 1 CFM (28.3 L/min) / Particle Size Range 0.3 to 25 μm / Integrated Pump

Flow Rate 1 CFM (28.3 L/min) / Particle Size Range 0.5 to 25 μm / Integrated Pump / VHP Option

Water-Based Condensation Particle Counters (WCPCs) deliver accurate concentrations of particles in gases while making use of safe, eco-friendly and easily available distilled water. When combined with a particle sizer, nanoparticle size distributions and concentration can be...

Poor testing can lead to low product quality and revenue loss. Using TSI particle counters enables real-time contamination detection, supporting process optimization and higher manufacturing efficiency.

MSP’s PRE testing solutions bring academic-level precision to fab-floor challenges, enabling engineers to validate cleaning performance with confidence.

Compliance with ISO 14644 standards is essential to control airborne particulate contamination levels.

Flow Rate 0.1 CFM (2.83 L/min) / Channel Sizes 0.2 to 25 μm / Integrated Pump

We offer cutting-edge solutions tailored to the unique (nanoscale) challenges of the semiconductor manufacturing market. With our advanced instrumentation and expertise, we provide critical tools for process control, quality assurance, and cleanroom monitoring. Stay ahead of...