X

This website uses cookies

Customize

By clicking "Accept Cookies," you consent to the use of cookies on your device. TSI uses cookies to deliver a better online experience, to measure traffic, and for marketing purposes, in some cases, with the assistance of third parties. To learn more, please visit our Privacy Policy at the bottom of any page. You can customize your cookie-related settings at any time by clicking on Cookie Preference at the bottom of any page.

800-680-1220 / +1 651-490-2860 (US) All Locations
English English

SEARCH

High-Flow Turbo II Vaporizer 2855PE

SKU: 2855PE

MSP's Turbo II™ Vaporizer 2855PE is designed for high-precision microelectronic applications that require mid to high vapor flow rates. Based off of the field proven, highly reliable, and low-maintenance MSP Turbo™ Vaporizers, the new 2855PE delivers twice the vapor output in a footprint that is half the size.

Product Details

Dimensions (HxWxD)

249 mm x 79 mm x 142 mm (9.8 inch x 3.1 inch x 5.6 inch)
Weight 5.1 kg (11.2 lb)
Fittings (on the unit) Carrier Gas Inlet 1/4 in. VCR female split nut
Liquid Inlet 1/8 in. VCR female
Vapor Outlet 1/4 in. VCR female
Compressed Air 4 mm instant tube fitting
Wetted Parts SS 316, PEEK, PTFE, Elgiloy®, FFKM
Leak Integrity ≤ 1x 10-8 Pa·m3/s Helium
Heater Power Requirements1 208 VAC, 60 Hz, 900 W
Carrier Gas Inert gas recommended
Max Carrier Gas Flow1 10 standard liters/min N2 @ 50 psig
Max Liquid Flow2 40 g/min (TEOS or equivalent)
System Pressure Limit 150 psig
Compressed Air 90 to 110 psig
Temperature Range3 40°C to 200°C
Temperature Sensor 2 type K thermocouples

Specifications subject to change without notice.

1 Max Carrier Flow, Heater Power (W) and Line Voltage are factory adjustable, visit www.tsi.com/contact to request more information.
2 Max. liquid flow is process dependent. The spec assumes a vaporizer temperature of 200°C, max. carrier gas flow and pressure <50 Torr immediately downstream of the vaporizer..
3 Appropriate venting is required.

Related Items

Copyright © 2024 TSI. All Rights Reserved.