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High-Flow Turbo II Vaporizer 2855PE

High-Flow Turbo II Vaporizer 2855PE

UGS: 2855PE

MSP's Turbo II™ Vaporizer 2855PE is designed for high-precision microelectronic applications that require mid to high vapor flow rates. Based off of the field proven, highly reliable, and low-maintenance MSP Turbo™ Vaporizers, the new 2855PE delivers twice the vapor output in a footprint that is half the size.

Demander un devis

Product Details

Dimensions (HxWxD)	249 mm x 79 mm x 142 mm (9.8 inch x 3.1 inch x 5.6 inch)
Weight	5.1 kg (11.2 lb)
Fittings (on the unit)	Carrier Gas Inlet	1/4 in. VCR female split nut
	Liquid Inlet	1/8 in. VCR female
	Vapor Outlet	1/4 in. VCR female
	Compressed Air	4 mm instant tube fitting
Wetted Parts	SS 316, PEEK, PTFE, Elgiloy®, FFKM
Leak Integrity	≤ 1x 10^-8 Pa·m³/s Helium
Heater Power Requirements¹	208 V_AC, 60 Hz, 900 W
Carrier Gas	Inert gas recommended
Max Carrier Gas Flow¹	10 standard liters/min N₂ @ 50 psig
Max Liquid Flow²	40 g/min (TEOS or equivalent)
System Pressure Limit	150 psig
Compressed Air	90 to 110 psig
Temperature Range³	40°C to 200°C
Temperature Sensor	2 type K thermocouples

Specifications subject to change without notice.

¹Max Carrier Flow, Heater Power (W) and Line Voltage are factory adjustable, visit www.tsi.com/contact to request more information.
²Max. liquid flow is process dependent. The spec assumes a vaporizer temperature of 200°C, max. carrier gas flow and pressure <50 Torr immediately downstream of the vaporizer..
³Appropriate venting is required.