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Turbo-Vaporizer 2840PE

SKU: 2840PE

The 2840PE MSP Turbo™ Vaporizer is one of our smallest vaporizers and has the state-of-the art PE atomizer with on-board flow control. This model has been optimized for low flow applications; featuring an ultra-fast response time making it a great choice for ALD applications.

Product Details

Dimensions

290 mm x 80 mm x 110 mm (11.4 in. x 3.3 in. x 4.3 in.)

Fittings (on the unit) Carrier Gas Inlet 1/4 in. VCR female split nut
Liquid Inlet 1/8 in. VCR female
Vapor Outlet 1/4 in. VCR male
Compressed Air 4 mm instant tube fitting
Wetted Parts SS 316, PEEK, PCTFE, Kalrez®, Elgiloy®
Leak Integrity ≤1 x 10-8 Pa·m3/s Helium
Heater Power Requirements 110 VAC, 60 Hz, 300W
Carrier Gas Inert gas recommended
Max Carrier Gas Flow1 8.5 standard L/min N2
(@ 70 psig inlet pressure)
Max. Liquid Flow2 720 g/hr (TEOS equivalent)
60 g/hr (H2O)
System Pressure Limit 120 psig
Compressed Air 90 to 110 psi
Temperature Range 40°C to 160°C
160°C to 200°C with optional piezo cooling package
Vaporizer Body Vacuum tight chamber with multi-stage heat exchanger, SS 316 construction
Temperature Sensor 2 Type K thermocouples

Specifications subject to change without notice

1 Up to 15 standard L/min available.
2 Max. liquid flow is process dependent. The spec assumes a vaporizer temperature of 180° C or higher, Ar carrier gas from 4-7 SLPM, and pressure <50 Torr immediately downstream of the vaporizer.

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