Turbo-Vaporizer 2840PE

Artikelnr: 2840PE

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The 2840PE Turbo-Vaporizer™ is one of our smallest vaporizers and has the state-of-the art PE atomizer with on-board flow control. This model has been optimized for low flow applications; featuring an ultra-fast response time making it a great choice for ALD applications.

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*Ein neueres Modell dieses Produktes ist jetzt verfügbar.

Product Details

Dimensions	290 mm x 84 mm x 109 mm (11.4 in. x 3.3 in. x 4.3 in.)
Fittings (on the unit)	Carrier Gas Inlet	1/4 in. VCR female split nut
	Liquid Inlet	1/8 in. VCR female
	Vapor Outlet	1/4 in. VCR female
	Compressed Air	4 mm instant tube fitting
Wetted Parts	SS 316, PEEK, PCTFE, PTFE, Kalrez®, Elgiloy®
Leak Integrity	<1 x 10^-9 scc/sec Helium
Heater Power Requirements	110 VAC, 60 Hz, 300W
Carrier Gas	Inert gas recommended
Gas Inlet Pressure Range	0–80 psig inlet pressure
Max Carrier Gas Flow* N₂	15 standard L/min**
Max. Liquid Flow* TEOS equivalent	720 g/hr
Max. Liquid Flow* DI Water	60 g/hr
System Pressure Limit	120 psig
Compressed Air	90 to 110 psi
Temperature Range	40°C to 200°C
Vaporizer Body	Vacuum tight chamber with multi-stage heat exchanger, SS 316 construction
Temperature Sensor	Type K thermocouple

Specifications subject to change without notice
* Liquid and gas flow ranges are affected by liquid and gas type
** Standard model up to 7 standard L/min; up to 15 standard L/min available