Turbo Vaporizer 2840PE

Model Number: 2840PE

The 2840PE MSP Turbo™ Vaporizer is one of our smallest vaporizers and has the state-of-the art PE atomizer with on-board flow control. This model has been optimized for low flow applications; featuring an ultra-fast response time making it a great choice for ALD applications.

Discontinued

Recommended Replacement

*A newer model of this product is now available.

Product Details

Dimensions	9.6 inch x 3.8 inch x 4.2 inch (244 mm x 97 mm x 107 mm)
Fittings (on the unit)	Carrier Gas Inlet	1/4 in. VCR female split nut
	Liquid Inlet	1/8 in. VCR female
	Vapor Outlet	1/4 in. VCR male
	Compressed Air	4 mm instant tube fitting
Wetted Parts	SS 316, PEEK, PCTFE, Elgiloy®, FFKM, PTFE
Leak Integrity	≤1 x 10^-9 Pa·m³/s (He)
Heater Power Requirements	110 V_AC, 60 Hz, 300W
Carrier Gas	Inert gas recommended
Max Carrier Gas Flow¹	7.0 standard liters/min N₂ at 80 psig 4.5 standard liters/min N₂ at 50 psig
Max Liquid Flow²	720 g/hr. (TEOS or equivalent) 60 g/hr (H₂O or equivalent)
System Pressure Limit	150 psig
Compressed Air	90 to 110 psig
Temperature Range	40°C to 160°C 160°C to 200°C with optional piezo cooling package
Vaporizer Body	Vacuum tight chamber with multi-stage heat exchanger, SS 316 construction
Temperature Sensor	2 Type K thermocouples

Specifications subject to change without notice

¹ Max Carrier Gas Flow Rate is adjustable; visit www.tsi.com/contact to request more information.
² Max. liquid flow is process dependent. The spec assumes a vaporizer temperature of 180° C or higher, N₂ carrier gas ≥4.5 SLPM, and pressure <10 Torr immediately downstream of the vaporizer.