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The Turbo™ LFC
When high performance is the only option
Built upon field-proven technology, the NEW MSP Turbo™ Liquid Flow Controller is specifically engineered to work with MSP Turbo™ Vaporizers. When paired together, our new LFC and direct liquid injection (DLI) vaporizers provide best-in-class performance for liquid delivery applications (including CVD, PECVD, ALD, and MOCVD), resulting in faster throughput, higher yield, less downtime, and less liquid material cost.
Our new liquid flow controller contains both a liquid flow meter and control electronics, which can control the piezo valve on our PE MSP Turbo™ Vaporizers. The MSP Turbo™ LFC can also control vaporizers without a piezo valve using the optional external piezo valve accessory.
Now you have the ability to purchase your liquid flow controller and vaporizer from a single manufacturer, ensuring your process has the highest quality vapor delivery solution available on the market.
MSP’s Turbo LFC provides world-class accuracy and linearity, supplying the high performance you need to support your high-precision semiconductor process.
Designed for speed, our new Turbo LFC has an industry-leading response time – getting to ±1% of set point within 300ms. This saves time and money by increasing throughput and reducing waste. Fast response also makes the 2950 LFC an excellent choice for short pulse processes like ALD and short pulse CVD.
The Turbo LFC’s exceptional repeatability helps users to reduce chamber-to-chamber or tool-to-tool variation, enabling better yield and higher throughput. Processes can be more tightly controlled – allowing manufacturing engineers to know sooner if the process is moving out of control.
The flow sensor in our Turbo LFC doesn’t require PID tuning for every process change, and when it is required, PID adjustments are easier to make. The speed of our sensor provides good response time performance using less aggressive PID settings, meaning that the “out of the box” PID values can be used for a wide range of set points and process conditions without needing to be changed.
If your application requires an ultra-fast response rate, our user software makes it easy to adjust the PID settings, watch the flow curve, and calculate the time to achieve your set point.
For best accuracy, factory calibration with your chosen liquid is still the best option. However, you have the flexibility of using a variety of liquids without waiting for factory calibration by either:
This quick field adjustment, while not as precisely accurate, gives you a quick repeatable measurement enabling you to speed up your development process and reduce the number of LFCs needed.
With full scale units available from 200mg to 40g/min, the Turbo LFC can provide the liquid flow control performance you need across a wide range of applications.
The flow sensor design in the Turbo Liquid Flow Controller is less affected by environmental temperature changes, and the sophisticated control algorithm compensates for environmental temperature and pressure changes. Together, these features provide high quality flow control in a variety of process environments.
There are more communication options available to control the Turbo LFC, including EtherCAT, and RS485.
With onboard diagnostics, your new LFC gives you access to real-time health monitoring, so you can be sure your instrument is working properly.
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