Turbo™ Liquid Flow Controller

The MSP Turbo™ Liquid Flow Controller (LFC) is designed to deliver unmatched precision and control in liquid delivery applications for CVD, PECVD, ALD, and MOCVD processes. When paired with MSP Turbo II™ Vaporizers, it provides an advanced solution that enhances throughput, reduces waste, and helps to increase yield.
 

Maximize Your Process Efficiency with the Turbo™ LFC

Fast Response Time: Achieve ±1% of setpoint within 300ms, optimizing throughput and minimizing material waste.​​​​​

Unparalleled Accuracy & Stability: Deliver precise, repeatable results for consistent process control.​​​​​

Seamless Liquid Changeovers: Switch between different liquids without factory calibration, accelerating R&D timelines.​​​​​

Protection from Environmental Variability: Advanced sensor technology compensates for external facturs such as temperature and pressure changes, ensuring stable flow control.​​​​​

Versatile Communication: Supports EtherCAT, RS485, and multiple analog protocols for seamless integration.​​​​​
 

Engineered for Performance & Flexibility

The Turbo™ LFC combines cutting-edge technology with user-friendly operation to support high-precision semiconductor applications. Its integrated liquid flow meter and control electronics provide superior accuracy, while the optional external piezo valve accessory extends compatibility with various vaporizer systems.
 

Reduce Costs & Improve Yield

By delivering reliable and repeatable liquid flow control, the Turbo™ LFC reduces tool-to-tool variation and enhances overall yield. Its long-term stability minimizes downtime and maintenance, helping you maintain peak operational efficiency.
 

Optimize Your Process - Contact Us Today!

Don’t compromise on liquid flow control. Upgrade to the MSP Turbo™ Liquid Flow Controller for the high-performance vapor delivery solution.