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Wafer contamination standards consist of particles deposited on a wafer (sizes from 100 mm to 450 mm) with the industry's best particle size and count control. These certified standards for wafer inspection tools are totally customized for each customer.

PRE Challenge Wafers are an affordable solution for Particle Removal Efficiency (PRE) testing resulting in reliable cleaning system validation.

Surface defect inspection for masks ensures high-quality lithography by detecting and addressing imperfections. Advanced inspection systems improve yield and efficiency in semiconductor manufacturing.

This manually-loaded particle deposition system deposits PSL and SiO2 spheres as small as 10 nm. Calibrate and qualify your defect inspection tools with ease, confidence, and efficiency by producing high volumes of high-quality custom contamination standards. Manual loading...

Ultra-high efficiency filtration down to 2 nm and below.The industry leading VPG-A6 Vapor Process Gas filter is an ultra-low pressure drop, ultra-high efficiency in-line filter designed for vapor and process gas filtration. This patent-protected 316L SS filter is chemically...

PRE Challenge Photomasks offer a cost-effective solution for Particle Removal Efficiency (PRE) testing, ensuring dependable validation of cleaning systems.

Choose your configuration of the global standard in aerosol size measurement. For more than 30 years, the TSI Scanning Mobility Particle Sizer (SMPS) spectrometers have helped gain new insights in aerosol research and assisted with calibrating other instrumentation. The US...