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Surface defect inspection for masks ensures high-quality lithography by detecting and addressing imperfections. Advanced inspection systems improve yield and efficiency in semiconductor manufacturing.

This manually-loaded particle deposition system deposits PSL and SiO2 spheres as small as 10 nm. Calibrate and qualify your defect inspection tools with ease, confidence, and efficiency by producing high volumes of high-quality custom contamination standards. Manual loading...

Ultra-high efficiency filtration down to 2 nm and below.The industry leading VPG-A6 Vapor Process Gas filter is an ultra-low pressure drop, ultra-high efficiency in-line filter designed for vapor and process gas filtration. This patent-protected 316L SS filter is chemically...

PRE Challenge Photomasks offer a cost-effective solution for Particle Removal Efficiency (PRE) testing, ensuring dependable validation of cleaning systems.

This manually-loaded particle deposition system deposits PSL and SiO2 spheres as small as 20 nm. Calibrate and qualify your defect inspection tools with ease, confidence, and efficiency by producing high volumes of high-quality custom contamination standards. Manual loading...

Flow Rate 1 CFM (28.3 LPM) - 3.5 CFM (100 LPM) / Channel Sizes 0.3 µm to 10 µm,(6) user selectable channels. Check out series of Videos & Quick Tips here.