Condensation Particle Counters
TSI’s cleanroom facility environmental monitoring products with built-in redundancy provide the confidence you need.
Vaporizers
Vaporizers are used in gas phase processes to transition a liquid into a gas for thin film deposition or other processes that require a vapor.
Particle Deposition Systems
Deposited particle size and count are controlled with precision, accuracy, and repeatability.
Difficult-to-Vaporize and Thermally-Sensitive Liquids
Discover how a global semiconductor tool manufacturer overcame challenges in vaporizing TEMAZr and CpZr precursors crucial for ZrO₂ deposition.
Ensuring High-Quality Wafer Production: The Importance of Particle Removal Efficiency Testing
High yields and minimal defects in semiconductor wafer production depend on effective cleaning systems. Proper validation ensures contaminants are removed, preserving wafer integrity throughout production.
Process Particles Suspensions
Process Particles™ Suspensions are used as particle material standards. They represent real-world contaminant particles encountered in semiconductor device fabrication processing.
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