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High efficiency filtration down to 2nm and up to 100 SLPM.The VPG-A3 Vapor Process Gas filter is an ultra-low pressure drop, highly-efficient in-line filter designed for vapor and process gas filtration. This patent-protected 316L SS filter, is chemically and thermally...

MSP, a Division of TSI, supplies wafer contamination standards and reticle contamination standards in the semiconductor industry for consistent and repeatable particle size and count control.

Only the AeroTrak+ Remote Particle Counters are backed by an industry exclusive 5 year laser warranty.

MSP’s Turbo II™ Vaporizer helped a CVD OEM double output and cut defects - boosting yield, efficiency, and customer satisfaction in tight gas box spaces.