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Turbo Vaporizer 2820

SKU: 2820

The 2820 MSP Turbo™ Vaporizer is a classic system. This model is a great choice for easy to vaporize precursors, and features wide internal channels to minimize clogging.


Discontinued
Recommended Replacement
*A newer model of this product is now available.

Product Details

Dimensions

224 mm x 183 mm x 137 mm (8.8 inch x 7.2 inch x 5.5 inch)
Fittings (on the unit) Carrier Gas Inlet 1/4 in. VCR female split nut
Liquid Inlet 1/8 in. VCR female
Vapor Outlet 1/4 inch VCR female
Wetted Parts SS 316 & Viton
Leak Integrity < 1 x 10-9 Pa·m3/s (He)
Heater Power Requirements 120 VAC, 60 Hz, 300W
Carrier Gas Inert gas recommended
Gas Inlet Pressure Range 0–80 psig inlet pressure
Max. Carrier Gas Flow1 30 standard liters/min N2 at 80 psig
20 standard liters/min N2 at 50 psig
Max Liquid Flow2 600 g/hr. (TEOS equivalent)
60 g/hr. (H2O)
System Pressure Limit 150 psig
Compressed Air 90 to 110 psig
Temperature Range 40°C to 200°C
Temperature Sensor 2 Type K thermocouples

Specifications subject to change without notice

1 Max Carrier Gas Flow Rate is adjustable; visit www.tsi.com/contact to request more information.

2 Max Liquid Flow Rate is process dependent. The spec assumes a vaporizer temperature of 180° C or higher, N2 carrier gas flow ≥20 SLPM, and pressure <10 Torr immediately downstream of the vaporizer.

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