Turbo-Vaporizer 2820

UGS: 2820

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The 2820 Turbo-Vaporizer™ is a classic system. This model is a great choice for easy to vaporize precursors, and features wide internal channels to minimize clogging.

Discontinué

Remplacement recommandé

Un nouveau modèle de ce produit est maintenant disponible.

Product Details

Dimensions	224 mm x 183 mm x 140 mm (8.8 in. x 7.2 in. x 5.5 in.)
Fittings (on the unit)	Carrier Gas Inlet	1/4 in. VCR female split nut
	Liquid Inlet	1/8 in. VCR female
	Vapor Outlet	1/2 in. VCR female
Wetted Parts	SS 316, Viton
Leak Integrity	<1 x 10^-9 scc/sec Helium
Heater Power Requirements	120 VAC, 60 Hz, 300W
Carrier Gas	Inert gas recommended
Gas Inlet Pressure Range	0–80 psig inlet pressure
Max. Carrier Gas Flow Rate* N₂	20 standard L/min
Max. Liquid Flow* TEOS equivalent	600 g/hr
Max. Liquid Flow* DI Water	60 g/hr
System Pressure Limit	120 psig
Temperature Range	40°C to 200°C
Temperature Sensor	Type K thermocouple