This website uses cookies
The web site is now storing only essential cookies on your computer. If you don't allow cookies, you may not be able to use certain features of the web site including but not limited to: log in, buy products, see personalized content, switch between site cultures. It is recommended that you allow all cookies.
800-680-1220 / +1 651-490-2860 (US) All Locations


2940 FC2 Liquid Flow Controller

SKU: 2940-01-1001

Precision control of an external Piezo valve with full scale (TEOS equivalent) of 6.4 g/min

*A newer model of this product is now available.

Product Details

This thermal Liquid Flow Controller (LFC) is designed to work with the PE MSP Turbo™ Vaporizers. The 2940 LFC is comprised of a thermal sensor to sense the mass flow rate of the liquid and generate a voltage to operate the piezoelectric control valve in the PE MSP Turbo™ Vaporizers. The 2940 features a fast response time making it a good choice for short duration vapor pulses frequently used in ALD or short pulse CVD. The 2940 features zoned ‘PID’ settings and a self-learning function for improved control.

Model 2940 Liquid Flow Controller FC2
Full Scale TEOS Equiv (g/min) 6.4
Full Scale DI Water (g/min) 1.0
Overpressure Resistance (bar) 2
Max Pressure Drop (mbar) 2
Capillary Inner Diameter (mm) 1.0
Power @ 24V (W) 48
Port Connectors 1/8 inch Male VCR Fitting
Operating Temp (ºC) 0–50
Operating Humidity (%) 20–80 non-condensing
Wetted Materials Quartz Glass/PEEK/SS316/Viton/Silicon RTV
Dimensions (mm/inches) 127 x 152 x 25 / 5 x 6 x 1
Weight (kg/lb) 0.45/1.0
Ambient Storage Temperature (ºC) -10–60
Mounting Slots Four slots 0.15 inches wide on a 4.75 inch x 0.75 inch pattern


Communications Pinout
Pin Function
1 +24V
2 Set-point (0–5V)
3 Monitor (0–5V)
6,7,8,9 Ground