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Precision control of an external Piezo valve with full scale (TEOS equivalent) of 6.4 g/min
This thermal Liquid Flow Controller (LFC) is designed to work with the PE MSP Turbo™ Vaporizers. The 2940 LFC is comprised of a thermal sensor to sense the mass flow rate of the liquid and generate a voltage to operate the piezoelectric control valve in the PE MSP Turbo™ Vaporizers. The 2940 features a fast response time making it a good choice for short duration vapor pulses frequently used in ALD or short pulse CVD. The 2940 features zoned ‘PID’ settings and a self-learning function for improved control.