2940 FC2 Liquid Flow Controller

Model Number: 2940-01-1001

Precision control of an external Piezo valve with full scale (TEOS equivalent) of 6.4 g/min

Discontinued

Recommended Replacement

*A newer model of this product is now available.

Product Details

This thermal Liquid Flow Controller (LFC) is designed to work with the PE MSP Turbo™ Vaporizers. The 2940 LFC is comprised of a thermal sensor to sense the mass flow rate of the liquid and generate a voltage to operate the piezoelectric control valve in the PE MSP Turbo™ Vaporizers. The 2940 features a fast response time making it a good choice for short duration vapor pulses frequently used in ALD or short pulse CVD. The 2940 features zoned ‘PID’ settings and a self-learning function for improved control.

Model	2940 Liquid Flow Controller FC2
Full Scale TEOS Equiv (g/min)	6.4
Full Scale DI Water (g/min)	1.0
Overpressure Resistance (bar)	2
Max Pressure Drop (mbar)	2
Capillary Inner Diameter (mm)	1.0
Power @ 24V (W)	48
Port Connectors	1/8 inch Male VCR Fitting
Operating Temp (ºC)	0–50
Operating Humidity (%)	20–80 non-condensing
Wetted Materials	Quartz Glass/PEEK/SS316/Viton/Silicon RTV
Dimensions (mm/inches)	127 x 152 x 25 / 5 x 6 x 1
Weight (kg/lb)	0.45/1.0
Ambient Storage Temperature (ºC)	-10–60
Mounting Slots	Four slots 0.15 inches wide on a 4.75 inch x 0.75 inch pattern