Turbo Vaporizer 2820

Model Number: 2820

The 2820 MSP Turbo™ Vaporizer is a classic system. This model is a great choice for easy to vaporize precursors, and features wide internal channels to minimize clogging.

Discontinued

Recommended Replacement

*A newer model of this product is now available.

Product Details

Dimensions	224 mm x 183 mm x 137 mm (8.8 inch x 7.2 inch x 5.5 inch)
Fittings (on the unit)	Carrier Gas Inlet	1/4 in. VCR female split nut
	Liquid Inlet	1/8 in. VCR female
	Vapor Outlet	1/4 inch VCR female
Wetted Parts	SS 316 & Viton
Leak Integrity	< 1 x 10-⁹ Pa·m³/s (He)
Heater Power Requirements	120 V_AC, 60 Hz, 300W
Carrier Gas	Inert gas recommended
Gas Inlet Pressure Range	0–80 psig inlet pressure
Max. Carrier Gas Flow¹	30 standard liters/min N₂ at 80 psig 20 standard liters/min N₂ at 50 psig
Max Liquid Flow²	600 g/hr. (TEOS equivalent) 60 g/hr. (H₂O)
System Pressure Limit	150 psig
Compressed Air	90 to 110 psig
Temperature Range	40°C to 200°C
Temperature Sensor	2 Type K thermocouples

Specifications subject to change without notice

¹Max Carrier Gas Flow Rate is adjustable; visit www.tsi.com/contact to request more information.

² Max Liquid Flow Rate is process dependent. The spec assumes a vaporizer temperature of 180° C or higher, N₂ carrier gas flow ≥20 SLPM, and pressure <10 Torr immediately downstream of the vaporizer.