Product Details
Dimensions |
297 mm x 117 mm x 173 mm (11.7 inch x 4.6 inch x 6.8 inch) |
|
Fittings (on the unit) | Carrier Gas Inlet | 1/4 in. VCR female split nut |
Liquid Inlet | 1/8 in. VCR female | |
Vapor Outlet | 1/2 in. VCR female | |
Compressed Air | 4 mm instant tube fitting | |
Wetted Parts | SS 316, PEEK, PCTFE, Elgiloy®, FFKM, PTFE | |
Leak Integrity | ≤ 1x 10-9 Pa·m3/s (He) | |
Heater Power Requirements | 208 VAC1, 60 Hz, 300W | |
Carrier Gas | Inert gas recommended | |
Max Carrier Gas Flow1 | 7.0 standard liters/min N2 at 80 psig 4.5 standard liters/min N2 at 50 psig |
|
Max Liquid Flow2 | 1,200 g/hr (TEOS or equivalent) 120 g/hr (H2O or equivalent) |
|
System Pressure Limit | 150 psig | |
Compressed Air | 90 to 110 psig | |
Temperature Range | 40°C to 160°C 160°C to 200°C with optional piezo cooling package |
|
Vaporizer Body | Vacuum tight chamber with multi-stage heat exchanger, SS 316 construction | |
Temperature Sensor | 2 Type K thermocouples |
Specifications subject to change without notice
1 Max Carrier Gas Flow Rate is adjustable; visit www.tsi.com/contact to request more information.
2 Max. liquid flow is process dependent. The spec assumes a vaporizer temperature of 180° C or higher, N2 carrier gas ≥4.5 SLPM, and pressure <10 Torr immediately downstream of the vaporizer.