SP1 and SP2 Wafer Calibration Standards

SP1 & SP2 Calibration Standards are precision-engineered tools for the calibration, verification and re-qualification of the most common wafer surface inspection systems (like Surfscan® from KLA) used in semiconductor manufacturing. These standards play a crucial role in ensuring the accuracy and reliability of inspection equipment, which is essential to maintain high yields and quality in mature nodes of semiconductor fabrication for years to come.

Based on a combination of industry-leading equipment knowledge and particle deposition expertise, MSP provides a comprehensive line of NIST-traceable Calibration Standards, including documentation of manufacturing processes and controls, inspection reports using a Surfscan® tool, and other certification guarantees. This ensures that customers receive best-in-class standards with the narrowest particle distributions, highest particle size accuracy for their critical surface inspection applications.

MSP's Cal-Dep™ portfolio ensures that this industry workhorse inspection equipment is calibrated to factory standards so fabs can continue to operate  at peak performance.

Applications

• Inspection tool qualification
• Inspection tool calibration
• Process tool monitoring
• Bare silicon wafer IQC/OQC
• Advanced Process Control (APC)

Features and Benefits

• NIST traceability
• Multiple wafer sizes
• Highest accuracy calibration standards
• Competitive pricing
• Designed for fab environment
• Fast delivery (off the shelf)
• Easy ordering
• Conforms to OEM calibration requirements
• Particle sizes matched to original calibration curves

Our Offering - Request a quote to see all variants!

SP1 and SP2 Wafer Calibration Standards offer broad, general-purpose PSL particle coverage from 40nm to 3040nm, available across both 300mm and 200mm wafer sizes. Customers can choose single-size full-deposit wafers for targeted calibration needs, consolidated 10-spot or 12-spot multi-spot wafers for full-range coverage in a single standard, or custom configurations built to specific requirements.

Full-deposit 300mm

• 12 nominal/NIST sizes (40nm - 3040nm)
• Count: 2,000 ± 500 (2,000 ± 1,000 for 3040nm)
• Standard spot pattern width: 20mm ± 4mm

Full-deposit 200mm

• 10 nominal/NIST sizes (40nm - 3040nm, plus a 200mm-only 494nm option)
• Count: 2,000 ± 500 (5,000 ± 1,250 for 494nm; 2,000 ± 1,000 for 3040nm)
• Standard spot pattern width: 20mm ± 4mm

Multi-spot 300mm

• 12-spot wafers covering the same size range in one deposit
• Total particle count 5,000 ± 1,250 (5,000 ± 2,500 for 3040nm)

Multi-spot 200mm

• 10-spot wafers covering the same size range in one deposit 
• Total particle count 5,000 ± 1,250 (5,000 ± 2,500 for 3040nm)

Custom

• Build-to-order 300mm/200mm options

Surfscan is a registered trademark of KLA Corporation.