Based on a combination of industry-leading equipment knowledge and particle deposition expertise, MSP provides a comprehensive line of NIST-traceable SPx Calibration Standards, including documentation of manufacturing processes and controls, inspection reports using a KLA Surfscan® tool, and other certification guarantees. This ensures that customers receive best-in-class standards with the narrowest particle distributions, highest particle size accuracy for their critical surface inspection applications..
MSP's Cal-Dep™ portfolio ensures that this industry workhorse inspection equipment is calibrated to factory standards so fabs can continue to operate at peak performance.
Applications
- Inspection tool qualification
- Inspection tool calibration
- Process tool monitoring
- Bare silicon wafer IQC/OQC
- Advanced Process Control (APC)
Features and Benefits
- NIST traceability
- Multiple wafer sizes
- Highest accuracy calibration standards
- Competitive pricing
- Designed for fab environment
- Fast delivery (off the shelf)
- Easy ordering
- Conforms to OEM calibration requirements
- Particle sizes matched to original calibration curves
Platform Offerings
- Individual full (blanket) deposited wafers, one particle size on each wafer - Contact us for more info.
- Multispot deposits of particle sizes on a single wafer
- Cal-Dep™ sets of full-deposited wafers
| Model | Description | Nominal (Modal) Diameters [nm] |
Standard Particle Count | Request a Quote |
|---|---|---|---|---|
| 2200-01-9000 | SP1/2 20mm 12-spot 300mm PSL | 40 (44), 50 (55), 60 (65), 83 (86), 102 (105), 126 (128), 155 (155), 204 (204), 304 (304), 360 (360), 1112 (1112), 3040 (3040) |
2,000 ± 500 (60-1112 nm) 2,000 ± 1,000 (3040 nm) |
Request a Quote |
| 2200-01-9001 | SP1 20mm 10-spot 200mm PSL | 60 (65), 83 (86), 102 (105), 126 (128), 155 (155), 204 (204), 304 (304), 360 (360), 1112 (1112), 3040 (3040) | Request a Quote | |
| 2200‑01-5065 | Set of 10 Wafers 200mm Full Deposit Pattern PSL | 60 (65), 83 (86), 102 (105), 126 (128), 155 (155), 204 (204), 304 (304), 360 (360), 1112 (1112), 3040 (3040) | 5,000 | Request a Quote |
| 2200‑01-5066 | Set of 10 Wafers 300mm Full Deposit Pattern PSL | 10,000 | Request a Quote | |
| 2200‑01-5067 | Set of 12 Wafers 300mm Full Deposit Pattern PSL | 40 (44), 50 (55), 60 (65), 83 (86), 102 (105), 126 (128), 155 (155), 204 (204), 304 (304), 360 (360), 1112 (1112), 3040 (3040 | Request a Quote |
Surfscan is a registered trademark of KLA Corporation.
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