800-680-1220 / +1 651-490-2860 (US) All Locations
English English

SEARCH

SPx Calibration Standards

Cal-Dep Wafer and Reticle Calibration Contamination StandardsMSP's SPx Calibration Standards are precision engineered tools for the calibration, verification and re-qualification of the most common wafer surface inspection systems used in semiconductor manufacturing. These standards play a crucial role in ensuring the accuracy and reliability of inspection equipment, which is essential for maintaining high yields and quality in mature nodes of semiconductor fabrication.

Based on a combination of industry-leading equipment knowledge and particle deposition expertise, MSP provides a comprehensive line of NIST-traceable SPx Calibration Standards, including documentation of manufacturing processes and controls, inspection reports using a KLA Surfscan® tool, and other certification guarantees. This ensures that customers receive best-in-class standards with the narrowest particle distributions, highest particle size accuracy for their critical surface inspection applications..

MSP's Cal-Dep™ portfolio ensures that this industry workhorse inspection equipment is calibrated to factory standards so fabs can continue to operate at peak performance.

Surfscan® (SPx) Calibration Standards are precisionengineered tools for the calibration, verification and re-qualification of the most common wafer surface inspection systems used in semiconductor manufacturing.Applications

  • Inspection tool qualification
  • Inspection tool calibration
  • Process tool monitoring
  • Bare silicon wafer IQC/OQC
  • Advanced Process Control (APC)

Featured and Benefits

  • NIST traceability
  • Multiple wafer sizes
  • Highest accuracy calibration standards
  • Competitive pricing
  • Designed for fab environment
  • Fast delivery (off the shelf)
  • Easy ordering
  • Conforms to OEM calibration requirements
  • Particle sizes matched to original calibration curves

Platform Offerings

  • Individual full (blanket) deposited wafers, one particle size on each wafer - Contact us for more info.
  • Multispot deposits of particle sizes on a single wafer
  • Cal-Dep™ sets of full-deposited wafers
Model Description Nominal (Modal)
Diameters [nm]		 Standard Particle Count Request a Quote
2200-01-9000 SP1/2 12-spot 300mm PSL 40 (44), 50 (55), 60 (65), 83 (86), 102 (105), 126 (128), 155 (155), 204 (204), 304 (304), 360 (360), 1112 (1112), 3040 (3040)

2,000 ± 500 (60-1112 nm)

2,000 ± 1,000 (3040 nm)

 RFQ
2200-01-9001 SP1 10-spot 200mm PSL 60 (65), 83 (86), 102 (105), 126 (128), 155 (155), 204 (204), 304 (304), 360 (360), 1112 (1112), 3040 (3040) RFQ
2200‑01-5065 Set of 10 Wafers 200mm Full Deposit Pattern PSL 60 (65), 83 (86), 102 (105), 126 (128), 155 (155), 204 (204), 304 (304), 360 (360), 1112 (1112), 3040 (3040) 5,000 RFQ
2200‑01-5066 Set of 10 Wafers 300mm Full Deposit Pattern PSL 10,000 RFQ
2200‑01-5067 Set of 12 Wafers 300mm Full Deposit Pattern PSL 40 (44), 50 (55), 60 (65), 83 (86), 102 (105), 126 (128), 155 (155), 204 (204), 304 (304), 360 (360), 1112 (1112), 3040 (3040) RFQ

 

Triple-wrapped 200mm and 300mm wafer carriersRelated Accessories

We offer various methods for shipping SPx Calibration Standards, tailored to different customer needs. Our careful packaging guarantees the safety of SPx Calibration Standards during transport and ensures that they arrive in excellent condition, ready for precise calibration and performance optimization.

Model Description Request a Quote
6011577 Crystalpak 200mm Wafer Shipping Box RFQ
2200-81-5008 SB300 300mm FIMS-Compatible FOSB RFQ

 

You may find more interesting information in our SPx Calibration Standards specificiation sheet.

Surfscan is a registered trademark of KLA Corporation.

Copyright © 2024 TSI. All Rights Reserved.