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MSP's SPx Calibration Standards are precision engineered tools for the calibration, verification and re-qualification of the most common wafer surface inspection systems used in semiconductor manufacturing. These standards play a crucial role in ensuring the accuracy and reliability of inspection equipment, which is essential for maintaining high yields and quality in mature nodes of semiconductor fabrication.
Based on a combination of industry-leading equipment knowledge and particle deposition expertise, MSP provides a comprehensive line of NIST-traceable SPx Calibration Standards, including documentation of manufacturing processes and controls, inspection reports using a KLA Surfscan® tool, and other certification guarantees. This ensures that customers receive best-in-class standards with the narrowest particle distributions, highest particle size accuracy for their critical surface inspection applications..
MSP's Cal-Dep™ portfolio ensures that this industry workhorse inspection equipment is calibrated to factory standards so fabs can continue to operate at peak performance.
2,000 ± 500 (60-1112 nm)
2,000 ± 1,000 (3040 nm)
We offer various methods for shipping SPx Calibration Standards, tailored to different customer needs. Our careful packaging guarantees the safety of SPx Calibration Standards during transport and ensures that they arrive in excellent condition, ready for precise calibration and performance optimization.
You may find more interesting information in our SPx Calibration Standards specificiation sheet.
Surfscan is a registered trademark of KLA Corporation.