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Surfscan® (SPx) Calibration Standards are precision engineered tools for the calibration, verification and re-qualification of the most common wafer surface inspection systems used in semiconductor manufacturing. These standards play a crucial role in ensuring the accuracy and reliability of inspection equipment, which is essential for maintaining high yields and quality in mature nodes of semiconductor fabrication.
Based on a combination of industry-leading equipment knowledge and particle deposition expertise, MSP provides a comprehensive line of NIST-traceable Surfscan® Calibration Standards, including documentation of manufacturing processes and controls, inspection reports using a Surfscan® tool, and other certification guarantees. This ensures that customers receive best-in-class standards with the narrowest particle distributions, highest particle size accuracy for their critical surface inspection applications..
MSP's Cal-Dep™ portfolio ensures that this industry workhorse inspection equipment is calibrated to factory standards so fabs can continue to operate at peak performance.
2,000 ± 500 (60-1112 nm)
2,000 ± 1,000 (3040 nm)
We offer various methods for shipping Surfscan® calibration standards, tailored to different customer needs. Our careful packaging guarantees the safety of Surfscan® calibration standards during transport and ensures that they arrive in excellent condition, ready for precise calibration and performance optimization.
You may find more interesting information in our Surfscan® Calibration Standards specificiation sheet