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Turbo Vaporizer 2860PE

SKU: 2860PE

The 2860PE MSP Turbo™ Vaporizer was designed as a drop-in replacement for poorly performing DLI valves. This model has the state-of-the art PE atomizer with on-board flow control, delivering superior vapor quality with significantly lower maintenance.

*A newer model of this product is now available.

Product Details


236 mm  x 81 mm x 89 mm (9.3 in. x 3.2 in. x 3.5 in.)

Fittings (on the unit) Carrier Gas Inlet 1/4 in. VCR male split nut
Liquid Inlet 1/8 in. VCR male
Vapor Outlet 1/4 in. VCR female
Wetted Parts SS 316, PEEK, PCTFE, Elgiloy®, FFKM, PTFE
Leak Integrity ≤1 x 10-9 Pa·m3/s Helium
Heater Power Requirements 220 VAC, 60 Hz, 300W
Carrier Gas Inert gas recommended
Max. Carrier Gas Flow1 3.5 standard liters/min N2 at 80 psig
2.0 standard liters/min N2 at 50 psig
Max Liquid Flow2 60 g/hr (H2O or equivalent)
720 g/hr (TEOS or equivalent)
Compressed Air 90 to 110 psig
System Pressure Limit 150 psig
Temperature Range 40°C to 160°C
160°C to 200°C with use of air cooling (connections provided)
Vaporizer Body Vacuum tight chamber with multi-stage heat exchanger, SS 316 construction
Temperature Sensor 2 Type K thermocouples

Specifications subject to change without notice

1 Max Carrier Gas Flow Rate is adjustable; visit www.tsi.com/contact to request more information.
2 Max. liquid flow is process dependent. The spec assumes a vaporizer temperature of 180° C or higher, N2 carrier gas ≥4.5 SLPM, and pressure <50 Torr immediately downstream of the vaporizer.