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The 2821 MSP Turbo™ Vaporizer is our highest liquid flow rate unit. This model features 3600W of heater power and can be used to deliver flow rates up to 6000g/hr (TEOS or equivalent).
417 mm x 140 mm x 183 mm (16.4 in. x 5.5 in. x 7.2 in.)
Specifications subject to change without notice
1 Max Carrier Gas Flow Rate is adjustable; visit www.tsi.com/contact to request more information.
2 Max Liquid Flow Rate is process dependent. The spec assumes a vaporizer temperature of 180° C or higher, N2 carrier gas flow ≥20 SLPM, and pressure <10 Torr immediately downstream of the vaporizer.