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Turbo Vaporizer 2821

SKU: 2821

The 2821 MSP Turbo™ Vaporizer is our highest liquid flow rate unit. This model features 3600W of heater power and can be used to deliver flow rates up to 6000g/hr (TEOS or equivalent).

Product Details


417 mm x 140 mm x 183 mm (16.4 in. x 5.5 in. x 7.2 in.)

Fittings (on the unit) Carrier Gas Inlet 1/4 in. VCR female split nut
Liquid Inlet 1/4 in. VCR female
Vapor Outlet 1/2 in. VCR female
Compressed Air 4 mm instant tube fitting
Wetted Parts SS 316, FFKM, PTFE, Nickel
Leak Integrity <1 x 10-9 Pa·m3/s (He)
Heater Power Requirements 220 VAC, 60 Hz, 3600W
Carrier Gas Inert gas recommended
Max Carrier Gas Flow1 30 standard liters/min N2 at 80 psig
20 standard liters/min N2 at 50 psig
Max. Liquid Flow Rate2 6,000 g/hr. (TEOS equivalent)
600 g/hr. (H2O or equivalent)
System Pressure Limit 150 psig
Compressed Air 90 to 110 psi
Temperature Range 40°C to 200°C
Vaporizer Body Vacuum tight chamber with multi-stage heat exchanger, SS 316 construction
Temperature Sensor 2 Type K thermocouples

Specifications subject to change without notice
1 Max Carrier Gas Flow Rate is adjustable; visit to request more information.

2 Max Liquid Flow Rate is process dependent. The spec assumes a vaporizer temperature of 180° C or higher, N2 carrier gas flow ≥20 SLPM, and pressure <10 Torr immediately downstream of the vaporizer.