Turbo Vaporizer 2820D

Product Details

Dimensions	218 mm x 183 mm x 140 mm (8.6 in. x 7.2 in. x 5.5 in.)
Fittings (on the unit)	Carrier Gas Inlet	1/4 in. VCR female split nut
	Liquid Inlet	1/8 in. VCR female
	Vapor Outlet	1/2 in. VCR female
Wetted Parts	SS 316, Viton
Leak Integrity	<1 x 10^-9 scc/sec Helium
Heater Power Requirements	120 VAC, 60 Hz, 300W
Carrier Gas	Inert gas recommended
Gas Inlet Pressure Range	0–80 psig inlet pressure
Max. Carrier Gas Flow Rate* N₂	20 standard L/min
Max. Liquid Flow* TEOS equivalent	600 g/hr
Max. Liquid Flow* DI Water	60 g/hr
System Pressure Limit	120 psig
Temperature Range	40°C to 200°C
Vaporizer Body	Vacuum tight chamber with multi-stage heat exchanger, SS 316 construction
Temperature Sensor	Type K thermocouple

Specifications subject to change without notice
* Liquid and gas flow ranges are affected by liquid and gas type

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