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Turbo Vaporizer 2801PE

SKU: 2801PE

The 2801PE MSP Turbo™ Vaporizer was designed for high flow, expansive vapors, making it a good solution for high flow TEMAZr applications. This model has the state-of-the art PE atomizer with on-board flow control, and the heat exchanger features wide internal pathways and a long residence time.

Product Details

Dimensions

300 mm x 119 mm x 173 mm (12.2 in. x 4.7 in. x 6.8 in.)

Fittings (on the unit) Carrier Gas Inlet 1/4 in. VCR female split nut
Liquid Inlet 1/8 in. VCR female
Vapor Outlet 1/2 in. VCR female
Compressed Air 4 mm instant tube fitting x 2
Wetted Parts SS 316, PEEK, PCTFE, PTFE, Kalrez®, Elgiloy®
Leak Integrity ≤1 x 10-8 Pa·m3/s Helium
Heater Power Requirements 208 VAC, 60 Hz, 300W
Carrier Gas Inert gas recommended
Max. Carrier Gas Flow1 8.5 standard L/min N2
(@ 70 inlet pressure)
Max. Liquid Flow2 1,200 g/hr (TEOS or equivalent)
120 g/hr (H2O or equivalent)
System Pressure Limit 120 psig
Compressed Air 90 to 110 psig
Temperature Range 40°C to 160°C
160°C to 200°C with optional piezo cooling package
Vaporizer Body Vacuum tight chamber with multi-stage heat exchanger, SS 316 construction
Temperature Sensor 2 Type K thermocouples

Specifications subject to change without notice

1 Up to 15 standard L/min available.
2 Max. liquid flow is process dependent. The spec assumes a vaporizer temperature of 180° C or higher, Ar carrier gas from 4-7 SLPM, and pressure <50 Torr immediately downstream of the vaporizer.

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