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Product Details
Conventional high-purity, point-of-use gas filters are used in a compressed gas line for particle removal. The VPG-A6 filter is also used downstream of a vaporizer under vacuum flow conditions to prevent particles, which could potentially be in the gas/vapor mixture, from entering the Chemical Vapor Deposition (CVD) or Atomic Layer Deposition (ALD) process chamber. Due to its unique design, the VPG-A6 filter has more thermal mass than competitive offerings, making it particularly well suited for use downstream of a vaporizer in a heated line – acting as almost a second stage heat exchanger.
Applications
- Vapor process gas
- Ultra-high purity gas
- High temperature
- Inert or reactive gases
- High and ultra-high vacuum
- Semiconductor manufacturing
Features and Benefits
- 316 Stainless Steel
- Ultra-high particle removal efficiency
- Ultra-low pressure drop
- Solid core – more thermal mass
- ½” VCR fittings
Industry Leading, Patent-protected Design
Cross-flow construction and short fiber 316L stainless steel media provide ultra-high efficiency with ultra-low pressure drop. Solid core provides more thermal mass for better performance downstream of a vaporizer.
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