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Particle Standards

Calibrate your surface scanning equipment

Whether testing for particle size, count, or composition, it is imperative to use reliable particle suspensions to calibrate your surface scanning equipment or particle counters. A particle standard consists of a specific size range and number concentration of solid particles suspended in ultra-pure water (UPW). This suspension is dispersed into clean air or nitrogen and deposited onto wafers and reticles in specific patterns and sizes.

Particle Standards are used to produce high-quality calibration standards for calibrating, qualifying, and monitoring the performance of wafer and photomask inspection systems.

MSP particle suspensions are available in two categories:

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