Liquid Flow Controller 2950-002

Model Number: 2950-002

TEOS Full Scale* (g/min): 0.2
TEMAZr Full Scale (g/min): 0.038
H₂O Full Scale (g/min): 0.14
*Nominal max flow determined using TEOS as reference liquid at 23±2°C. Flow rate range is a function of specified liquid.

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Product Details

Built upon field proven technology, the MSP Turbo™ Liquid Flow Controller 2950-002 was engineered to pair with MSP Turbo™ Vaporizers to provide a reliable, high-performance liquid vapor delivery solution for semiconductor thin film deposition processes (including CVD, PECVD, ALD, and MOCVD).

MSP Turbo™ LFC 2950 Specification Snapshot*

Accuracy % F.S.	±1.0
Repeatability % F.S.	±0.4
Linearity % F.S.	±0.6
Response time (s)	~1.0 to ±1% S.P.
Communication Interface: EtherCAT RS485 Analog	2xRJ45 9-pin D connector (male) 9-pin D connector (male)